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CORRECTION METHOD OF FILM THICKNESS MEASUREMENT VALUE FILM THICKNESS CORRECTOR AND EDDY CURRENT SENSOR
CORRECTION METHOD OF FILM THICKNESS MEASUREMENT VALUE FILM THICKNESS CORRECTOR AND EDDY CURRENT SENSOR
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机译：薄膜厚度测量值膜厚度校正器和涡流传感器的校正方法
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摘要
The present invention corrects the temperature drift of a sensor for measuring the film thickness of an object to be polished with a simple configuration and with high precision. The method of correcting the film thickness measurement value corrects the output signal of the eddy current sensor while the polishing process is being performed. The polishing process includes a first state in which the eddy current sensor and the object to be polished do not face, and a second state in which the eddy current sensor and the object to be polished face each other. In the method of correcting the thickness measurement value, the first measurement signal Xout, Yout outputted from the eddy current sensor in the first state is acquired (step S108), and the acquired first measurement signal and the first measurement signal are obtained in advance. Correction values (ΔX, ΔY) are calculated based on the set reference signals (Xsd, Ysd) (step S109), and second measurement signals (X, Y) output from the eddy current sensor in the second state are acquired (step S109) S104), the acquired 2nd measurement signal is correct|amended based on the calculated correction value while the grinding|polishing process is being performed (step S105).
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