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Improved autofocus method for a coordinate measuring machine and coordinate measuring machine

机译：改进了坐标测量机和坐标测量机的自动对焦方法

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摘要

Method (100) for determining a best focal distance of an optical sensor (14) provided with an objective (44) of a coordinate measuring machine (10) in relation to the surface of a workpiece (12) to be measured, wherein the optical sensor (14) and / or the workpiece (12) are movable in a Z-direction (20) so that a distance (22) in the Z-direction (20) between the workpiece (12) and the optical sensor (14) can be changed, comprising: a Determination and assignment step (102), in which a contrast criterion of images of the surface of the workpiece (12) to be measured recorded with the optical sensor (14) at differently set distances (22) between the workpiece (12) and the sensor (14 ) is determined and in which the respective set intervals (22) are assigned the value of the contrast criterion determined for this purpose by means of data technology and thus a pair of numbers is generated, this determination and assignment step (102) of the method (10 0) is always carried out in one and the same direction of change of the distance (22) either towards the workpiece (12) or away from the workpiece (12) and the greatest possible difference between the distances (22) set in one and the same direction of change results in a so-called Distance interval (38; 59; 66), wherein in the determination and assignment step (102) when the optical sensor (14) moves towards the workpiece (12) to be measured or when the optical sensor (14) moves away from the workpiece (12) to be measured away, the optical sensor (14) with a clock frequency F of the optical sensor (14) takes images of the surface of the workpiece (12) to be measured and while taking the images with the clock frequency F, one value for a contrast criterion and one characteristic value for each the distance between the optical sensor (14) and the workpiece (12) to be measured is determined for each of the image recordings and combined to form a pair of numbers for further data processing, the method (100) for determining a best focus distance of one with an objective (44 ) provided optical sensor (14) of a coordinate measuring machine (10) comprises at least one of the following further steps: a processing step (104), In the case of all previously determined values of the contrast criterion of all previously set distances (22), the value that represents the best contrast, the so-called current best value, is assigned a certain numerical value X and for which all other values according to their numerical ratio to the current best value are fractions of the Numerical value X are assigned as numerical values; An analysis step (106) in which a lower minimum value M

机译：用于确定具有待测量的工件（12）的表面的光学传感器（14）的最佳光学传感器（14）的最佳焦距的方法（100），其中光学传感器（14）和/或工件（12）可在Z方向（20）中移动，使得在工件（12）和光学传感器（14）之间的Z方向（20）中的距离（22）可以改变，包括：确定和分配步骤（102），其中在不同设定的距离（22）之间用光学传感器（22）以待测量的工件（12）的表面的图像的图像的图像的对比标准确定工件（12）和传感器（14），其中各个设定间隔（22）被分配了通过数据技术为此目的确定的对比标准的值，因此生成一对数字，这方法（10 0）的确定和分配步骤（102）总是在一个和中执行朝向工件（12）或远离工件（12）的距离（22）的变化相同的方向，并且在一个和相同的变化方向上设定的距离（22）之间的最大差异导致如此 - 被称为距离间隔（38; 59; 66），其中当光学传感器（14）朝向工件（12）朝向要测量的工件（12）或者当光学传感器（14）移动远离工件（12）时，在所述确定和分配步骤（102）中，光学传感器（14）的光学传感器（14）采用光学传感器（14）的时钟频率f，采用要测量的工件（12）的表面的图像，同时将图像与时钟频率f拍摄，一个值为对比标准对于每个图像记录确定光学传感器（14）和待测量的工件（12）之间的每个距离的一个特征值，并组合以形成一对数字以进行进一步的数据处理，方法（100）为了确定具有目标（44）的最佳焦距，所以提供坐标测量机（10）的光学传感器（14）包括以下进一步的进一步步骤中的至少一个：处理步骤（104），在所有情况下以前确定了对比标准的值在所有先前设置的距离（22）中，表示最佳对比的值，所谓的电流最佳值，被分配了一定的数值x，并且根据其数值比到当前最佳值的所有其他值是分数数值x的分配为数值;分析步骤（106），其中最初指定较小的最小值M

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公开/公告号DE102018206181B4

专利类型
公开/公告日2021-12-09

原文格式PDF
申请/专利权人 CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH;
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申请/专利号DE201810206181
发明设计人 CHRISTIAN FIEKERS;
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申请日2018-04-23
分类号G01B11/24;G01B11;G03B13/36;
国家 DE
入库时间 2022-08-24 22:43:59

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