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PREPARATION METHOD FOR COMPOSITE PZT PIEZOELECTRIC FILM BASED ON SOL-GEL METHOD AND ELECTROJET DEPOSITION METHOD
PREPARATION METHOD FOR COMPOSITE PZT PIEZOELECTRIC FILM BASED ON SOL-GEL METHOD AND ELECTROJET DEPOSITION METHOD
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机译：基于溶胶 - 凝胶法的复合PZT压电薄膜制备方法和电射精沉积法
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摘要
A preparation method for a composite PZT piezoelectric film based on a sol-gel method and an electrojet deposition method. The thickness of the composite PZT piezoelectric film prepared by the method can reach several to hundreds of microns, and compared with a PZT piezoelectric film prepared by means of a conventional single electrojet deposition method, the composite PZT piezoelectric film has the advantages that micropore defects are reduced, the crystal preferred orientation degree is improved, the combination condition of the composite PZT piezoelectric film and upper and lower electrodes is good, and properties such as piezoelectricity and ferroelectricity are significantly improved.
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