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首页> 外国专利> ADAPTER OF SAMPLE HOLDER FOR EVALUATION OF MECHANICAL DURABILITY OF THIN FILMS AND METHOD FOR EVALUATION OF QUALITY OF MECHANICAL DURABILITY OF THIN FILMS VIA THIS ADAPTER

ADAPTER OF SAMPLE HOLDER FOR EVALUATION OF MECHANICAL DURABILITY OF THIN FILMS AND METHOD FOR EVALUATION OF QUALITY OF MECHANICAL DURABILITY OF THIN FILMS VIA THIS ADAPTER

机译：样品保持器的适配器，用于评估薄膜机械耐久性的耐用性及通过该适配器评估薄膜机械耐久性质量的方法

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摘要

The invention is an adapter of sample holder for pursuance of method for evaluation of quality of mechanical durability of thin films which is formed by a hollow body (1), whose shell (101) is from below closed with a lid (8) which allows fixation of the adapter to a console of the holder of testing device and from above with a contact front face (2), on which is not only from the top fixed a tested sample (3) consisting of a substrate (31) and on it deposited thin film (32) but also there is from the bottom fixed a piezoelectric sensor (4) of acoustic emission which is equipped with a mechanical damper (5) and a preamplifier (6) of an electric signal which is through a connector (41) taken out from the body (1), where the essence of the invention is that the shell (101) and the contact front face (2) are designed as an assembly of two individual structural parts with different material composition, whereas the contact front face (2) is made of a transparent material which has mechanical stiffness and stability with the value of Young's modulus of elasticity higher than 40 GPa and at the place of its fixation there is an inner peripheral recess (103) in the shell (101), in which is placed LED illumination (7) which is connected through a coupler (71) with a source of electric energy which is placed outside of the body (1). Likewise, is the invention the method of evaluation of quality of mechanical durability of thin films deposited on transparent substrate with use of continuous monitoring and record of acoustic emission during low cycle repetitive scratch test with subcritical force by the help of the adapter.
机译：本发明是样品保持器的用于依据方法的用于由一个空心体（1），其外壳（101）形成的薄膜的机械耐久性质量评价的适配器从下方用盖子封闭（8），其允许适配器检测装置的保持器的控制台，并从上方与接触前表面（2），其上不仅是从固定在测试样品（3）的顶部包括衬底（31）的固定和在其上沉积的薄膜（32），但也有从底部固定其配备有机械阻尼器（5）和一个电信号，该电信号是通过一个连接器的前置放大器（6）的声发射的压电传感器（4）（41 ）中取出从主体（1），其中，本发明的实质是，所述壳体（101）和所述接触前表面（2）被设计成具有不同材料组成的两个单独的结构件的组件，而接触前面（2）由具有机械的透明材料的人刚度和稳定性与杨氏弹性模量的值大于40吉帕斯卡并在其固定的位置更高的有在所述壳体（101），在其被放置的LED照明（7）的内周的凹部（103），其是通过耦合器（71），通过该外侧放置在主体（1）的电能的源极连接。同样地，在本发明沉积有使用连续监测和声发射的记录透明基板上的薄膜的机械耐久性质量评价由适配器的帮助下使用亚临界力低循环重复划痕测试时的方法。

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