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Load port apparatus, EFEM, and method of installing load port apparatus
Load port apparatus, EFEM, and method of installing load port apparatus
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机译：装货港设备，EFEM，以及安装装货港设备的方法
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摘要
A load port apparatus includes an installation section, a frame section, a first wheel, a second wheel, and a supporter. The installation section includes an installation surface for installing a container for containing a substrate. The frame section is disposed on one side of the installation section, extends upward from this one side, and includes a lower fixation unit located below the installation surface. The first wheel is attached below the installation section and has a first diameter. The second wheel is attached below the installation section and further away from the frame section than the first wheel and has a second diameter smaller than the first diameter. The supporter is attached below the installation section and further away from the frame section than the first wheel and has a vertically adjustable distance from the installation surface to a lower end of the supporter.
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