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ENVIRONMENT MONITORING SYSTEM AND MONITORING METHOD BASED ON ENVIRONMENT MONITORING SYSTEM
ENVIRONMENT MONITORING SYSTEM AND MONITORING METHOD BASED ON ENVIRONMENT MONITORING SYSTEM
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机译：环境监测系统及基于环境监测系统的监测方法
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摘要
An environment monitoring system and a monitoring method based on an environment monitoring system. The monitoring method based on an environment monitoring system is used for monitoring air pollutant concentrations in a plurality of manufacturing procedure regions (10) in a clean room. The environment monitoring system comprises: a sampling apparatus, which is used for collecting an environmental sample in a manufacturing procedure region (10) and comprises a system sampling pipeline (114), the environmental sample comprising air; an analysis apparatus (12), which is in communication with an output end of the system sampling pipeline (114) and is used for analyzing the collected environmental sample; and an air supply apparatus (13), which is in communication with the system sampling pipeline (114) and is used for supplying purge air, and purging the system sampling pipeline (114) using the purge air. During a single sampling instance, the ratio of the time the air supply apparatus (13) purges the system sampling pipeline (114) to the time the sampling apparatus performs sampling is controlled to be 1:5.
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