首页>
外国专利>
A beam splitter integrated with a Schottky thermal field emission (TFE) source, a method of integrating a Schottky thermal field emission (TFE) source and a beam splitter, and a multi-beam forming method.
A beam splitter integrated with a Schottky thermal field emission (TFE) source, a method of integrating a Schottky thermal field emission (TFE) source and a beam splitter, and a multi-beam forming method.
[Purpose] To provide a system for preventing long-distance movement of a high-current beam before division. The beam splitter 314 integrated with the Schottky thermal field emission (TFE) source of one aspect of the present invention is integrated with the Schottky TFE emitter 304 having an extractor face plate 308 and the extractor face plate. It is characterized by comprising a stand-off 309 which is integrated with the stand-off and a micro-hole array plate 315 which is integrated with the stand-off and is arranged on the opposite side of the extractor face plate and has a plurality of micro-holes. [Selection diagram] Fig. 3
展开▼
