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首页> 外文会议>14th International Conference on Vacuum WEB Coating, 14th, Oct 25-27, 2000, Reno, Nevada >Very High Resolution Laser Scanning
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Very High Resolution Laser Scanning

机译：超高分辨率激光扫描

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摘要

Laser scanning systems were developed to deliver 100%, on-line, real-time, defect detection for a wide range of materials, i.e., photosensitives, coated films, glass, coated paper, metals and display industry applications In order to provide consistent detection and classification, at the highest possible resolution, the optical field must be flattened; "telecentric" laser systems were the result. These "ortho-normal" scanners found universal acceptance in high value-added production environments, on-line. In order to extend the technology into microdisplay, photo film, optical media and other applications, a high-resolution scanner designed specifically for narrow lines had to be developed. The scanner had to meet exceptional defect detection requirements while conforming to the moderate cost constraint imposed by the target applications. Additionally, the scanner had to be compact, production-ready and easily installed on production lines. The resultant scanner utilizes telecentric laser scanning technology, with integrated receivers. Multiple video channels are generated by the laser scanner (bright field, dark field, near dark field, polarization, etc.). The first generation systems are designed for reflection applications, but the fundamental laser scanning principles can be extended to transmission applications or combined reflection-plus-transmission applications. This paper reviews the fundamental needs/benefits of inspection, principles of defect detection and telecentric laser scanners. The new integrated ASC telecentric laser scanner/receiver system is described.
机译：激光扫描系统的开发旨在为多种材料（例如光敏材料，涂膜，玻璃，铜版纸，金属和显示行业应用）提供100％在线实时缺陷检测，以提供一致的检测和分类，必须以尽可能高的分辨率将光场展平；结果就是“远心”激光系统。这些“正交”扫描仪在高附加值生产环境中在线获得了普遍认可。为了将该技术扩展到微显示器，照相胶片，光学介质和其他应用中，必须开发专门为窄线设计的高分辨率扫描仪。扫描仪必须满足特殊的缺陷检测要求，同时要满足目标应用施加的适度成本约束。此外，扫描仪必须紧凑，可直接投入生产并且必须易于安装在生产线上。最终的扫描仪利用远心激光扫描技术和集成接收器。激光扫描仪会生成多个视频通道（明场，暗场，近暗场，偏振等）。第一代系统专为反射应用而设计，但是基本的激光扫描原理可以扩展到透射应用或反射加透射组合应用。本文回顾了检查的基本需求/好处，缺陷检测的原理和远心激光扫描仪。描述了新的集成ASC远心激光扫描仪/接收器系统。

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