Fringe Pattern Shift Detection with Nano Resolution

机译：纳米分辨率的条纹图案移位检测

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This paper presents a hybrid interference fringe analysis system with which fringe pattern shifts can be determined with nano resolution. The system consists of a laser interferometer for linear calibration and a CCD camera-based fringe analysis module. The nano resolution of fringe pattern shift measurement was achieved using fringe pattern matching and linear interpolation techniques. A statistical analysis shows that linear interpolation lessens the effect of noise on the determination of fringe pattern shifts at the zero-crossing points of the mismatch function.

机译：本文提出了一种混合干涉条纹分析系统，利用该系统可以以纳米分辨率确定条纹图案的偏移。该系统由用于线性校准的激光干涉仪和基于CCD相机的条纹分析模块组成。使用条纹图案匹配和线性插值技术可以实现条纹图案位移测量的纳米分辨率。统计分析表明，线性插值可减少噪声对失配函数零交叉点处条纹图案偏移确定的影响。

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来源
《2002 6th International Conference on Signal Processing Proceedings (ICSP'02) Vol.2; Aug 26-30, 2002; Beijing, China》|2002年|p.1823-1826|共4页
会议地点 Beijing(CN);Beijing(CN)
作者
D T Pham; Z Wang;
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作者单位

Systems Engineering Division, School of Engineering, Cardiff University, Cardiff CF24 0YF, UK;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
fringe pattern shift detection; fringe pattern matching; image matching; laser interferometry; nanotechnology;

机译：条纹图案偏移检测；条纹图案匹配；图像匹配；激光干涉测量；纳米技术;

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Fringe Pattern Shift Detection with Nano Resolution

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