Design and Fabrication of An Integrated CMOS-MEMS 3-Axis Accelerometer

机译：集成式CMOS-MEMS三轴加速度计的设计与制造

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

A monolithic integrated CMOS-MEMS three-axis accelerometer has been designed and fabricated. The sensor is a single structure that uses sidewall capacitors of comb fingers to sense acceleration in all three directions. The sensor plus on-chip CMOS circuitry is about 1mm by 1mm in size and is fabricated by a post-CMOS micromachining process that uses interconnect metal layers as etching mask and has only dry-etch steps involved. The sensor structure incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without any extra masks, material deposition or wafer bonding. Both behavioral simulaton and finite element simulation were conducted to verify and optimize the sensor design. A noise floor of 50 μg/Hz~(1/2) can be achieved.

机译：设计并制造了单片集成CMOS-MEMS三轴加速度计。该传感器是一个单一结构，使用梳齿的侧壁电容器来感应所有三个方向上的加速度。传感器加上片上CMOS电路的尺寸约为1mm x 1mm，是通过后CMOS微加工工艺制造的，该工艺使用互连金属层作为蚀刻掩模，并且仅涉及干法蚀刻步骤。传感器结构结合了薄膜结构和块状Si结构，以实现三轴加速度感测，而无需任何额外的掩模，材料沉积或晶圆键合。行为仿真和有限元仿真都进行了验证和优化传感器设计。可以达到50μg/ Hz〜（1/2）的本底噪声。

著录项

来源
《2003 Nanotechnology Conference and Trade Show Nanotech 2003 Vol.1 Feb 23-27, 2003 California, USA》|2003年|p.292-295|共4页
会议地点 San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US);San Francisco CA(US)
作者
Huikai Xie; Gary K. Fedder; Zhiyu Pan; Wilhelm Frey;
展开▼
作者单位

Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类一般工业技术;
关键词
integrated accelerometer; 3-axis accelerometer; CMOS-MEMS; vertical comb finger sensing;

机译：集成加速度计;三轴加速度计; CMOS-MEMS;垂直梳齿感测;

相似文献

外文文献
中文文献
专利

1. A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier [J] . Qu H., Fang D., Xie H. IEEE sensors journal . 2008,第9期

机译：具有低噪声，低功耗双斩波放大器的单片CMOS-MEMS 3轴加速度计
2. A new monolithic 3-axis thermal convective accelerometer: principle, design, fabrication and characterization [J] . Nguyen H. B., Mailly F., Latorre L., Microsystem technologies . 2015,第9期

机译：新型单片式三轴热对流加速度计：原理，设计，制造和特性
3. Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology [J] . Ya-Chu Lee, Ping-Lin Yang, Chun-I Chang, Proceedings . 2018,第13期

机译：采用CMOS-MEMS技术的垂直一体化加热器MOS型气体传感器的设计与制作
4. Design and Fabrication of An Integrated CMOS-MEMS 3-Axis Accelerometer [C] . Nanotechnology conference and trade show . 2003

机译：集成CMOS-MEMS 3轴加速度计的设计和制造
5. Inertial Sensor Design at Dynamic Range Extremes: Integrated CMOS-MEMS high-g and mu-g accelerometers. [D] . Tsao, Amy Wung. 2011

机译：动态范围极限条件下的惯性传感器设计：集成式CMOS-MEMS高g和mu g加速度计。
6. Design Fabrication and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer [O] . Shengran Cai, Wei Li, Hongshuo Zou, 2019

机译：单晶硅晶片中单片集成三轴高冲击加速度计的设计制造和测试
7. A MONOLITHIC CMOS-MEMS 3-AXIS ACCELEROMETER WITH A LOW-POWER, LOW-NOISE DUAL-CHOPPER AMPLIFIER [O] . H. Qu, D. Fang, H. Xie 2006

机译：具有低功耗，低噪声双斩波放大器的单片CMOS-MEMS 3轴加速度计
8. Design and Development of a 3-Axis Accelerometer (Mesa) [R] . Lange, W. G., Meldrum, M. M., Honkala, D. W. 1971

机译：三轴加速度计（mesa）的设计与开发

Design and Fabrication of An Integrated CMOS-MEMS 3-Axis Accelerometer

摘要

著录项

相似文献

相关主题

期刊订阅