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首页> 外文会议>2004 AGA operating section proceedings >The Application of MEMS Technology to On-lineAnalyzers for Natural Gas
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The Application of MEMS Technology to On-lineAnalyzers for Natural Gas

机译：MEMS技术在天然气在线分析仪中的应用

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Process Gas Chromatographs have been in use in the natural gas industry since the early eighties. The core analyticalrnelements are commonly manufactured with conventional fine-mechanical tools. Recently MEMS technology has enabledrna new level of performance for on-line natural gas analysis.rnMEMS (Micro Electro Mechanical Systems) technology combines mechanical and electronical techniques on a micro-scale.rnUsing micro-machining processing steps developed by the IC industry, chip-level devices are created which not onlyrnallow for a significant improvement of the interaction between these 2 disciplines, but also provides a much betterrncontrol of the processes which occur on this micro-scale.rnGas chromatography is one of the most suited scientific disciplines for MEMS technology. Besides the obvious sizernreduction (with the associated decrease in production and installation costs) and the reduction in consumables (bothrnpower and gas consumption), MEMS technology has a major impact on the analytical performance :rn?? Miniaturization of the Thermal Conductivity Detector (TCD), which drives its performance up to levels previouslyrnonly attainable with FID’s, and which indirectly enables the use of capillary columns for on-line C6+ analysis.rn?? Ultra precise integration of columns, detectors and sample injection system – the core analytical components –rnwith the channel system of the base silicon wafer, leading to a significant reduction of the internal deadrnvolume, which is absolutely crucial for the analytical performance of a GC.rn?? Reduction of the analytical module size, allowing for a much tighter temperature control of the analyticalrncomponents, which is essential for the repeatability of the analysis results.rnThe paper explains the advantages of MEMS technology for on-line process gas chromatography in detail, and givernexamples of practical MEMS applications with analytical results.
机译：自八十年代初以来，过程气体色谱仪已在天然气工业中使用。核心分析元件通常使用常规的精细机械工具制造。最近，MEMS技术为在线天然气分析提供了更高的性能。rnMEMS（微机电系统）技术在微观规模上结合了机械和电子技术。rn使用由IC行业开发的微加工处理步骤，不仅创建了两个级别的设备，它们不仅可以显着改善这两个学科之间的交互作用，而且可以更好地控制在此微型规模上发生的过程。气相色谱法是最适合MEMS技术的科学学科之一。除了明显的尺寸减小（伴随着生产和安装成本的降低）和消耗品的减少（动力和气体消耗）之外，MEMS技术还对分析性能产生了重大影响：导热系数检测器（TCD）的小型化，将其性能提高到以前只有FID才能达到的水平，并间接使毛细管色谱柱能够用于在线C6 +分析。色谱柱，检测器和样品注入系统（核心分析组件）与基础硅晶片的通道系统实现了超精确的集成，从而大大减少了内部死体积，这对于气相色谱的分析性能绝对至关重要。 ??减小分析模块的尺寸，可以对分析组分进行更严格的温度控制，这对于分析结果的可重复性至关重要。本文详细介绍了MEMS技术在在线过程气相色谱分析中的优势，并给出了一些示例。具有分析结果的实际MEMS应用。

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