Micro force sensor fabricated in the LTCC technology

机译：采用LTCC技术制造的微力传感器

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This paper presents resonant force sensor designed for the operation in the MHz range and for 0 to 6 N load. The LTCC technology is implemented for the sensor fabrication and a wireless readout of the measured data is provided. Used LTCC tape is characterised in order to demonstrate its mechanical and electrical properties at room temperature. Also, theoretical model of the sensor is developed to predict its behaviour. Fabricated sensor performance is experimentally characterised and obtained results are in good agreement with the ones derived from the presented theoretical model.

机译：本文介绍了设计用于MHz范围和0至6 N负载的谐振力传感器。 LTCC技术用于传感器制造，并提供对测量数据的无线读取。二手LTCC胶带的特性是为了证明其在室温下的机械和电气性能。而且，开发了传感器的理论模型以预测其性能。实验制造的传感器性能进行了表征，获得的结果与从提出的理论模型得出的结果非常吻合。

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来源
《2010 27th International Conference on Microelectronics Proceedings》|2010年|p.221-224|共4页
会议地点 Nis(RS);Nis(RS)
作者
Radosavljevic G.; Smetana W.; Maric A.; Zivanov Lj.; Unger M.; Stojanovic G.;
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Department of Electronics, Faculty of Technical Sciences University of Novi Sad, Trg Dositeja ObradoviÃÂ¿a 6, 21000 Novi Sad, Serbia;

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原文格式 PDF
正文语种 eng
中图分类微模组件;
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1. Potentiometric RuO2-Ta2O5 pH sensors fabricated using thick film and LTCC technologies [J] . Manjakkal Libu, Zaraska Krzysztof, Cvejin Katarina, Talanta: The International Journal of Pure and Applied Analytical Chemistry . 2016,第Null期

机译：使用厚膜和LTCC技术制造的电位RuO2-Ta2O5 pH传感器
2. A High-Performance LC Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (LTCC) Technology [J] . Chen Li, Chenyang Xue, Jijun Xiong, Sensors . 2014,第12期

机译：采用低温共烧陶瓷（LTCC）技术制造的高性能LC无线无源压力传感器
3. A Wireless Embedded Resonant Pressure Sensor Fabricated in the Standard LTCC Technology [J] . Radosavljevic G. J., Zivanov L. D., Smetana W., Sensors Journal, IEEE . 2009,第12期

机译：采用标准LTCC技术制造的无线嵌入式谐振压力传感器
4. Micro Force Sensor Fabricated in the LTCC Technology [C] . G. Radosavljevic, W. Smetana, A. Maric, International Conference on Microelectronics . 2010

机译：LTCC技术中制造的微型力传感器
5. Microwave and millimeter wave system on package using LTCC technology. [D] . Huang, Yong. 2004

机译：使用LTCC技术的封装上的微波和毫米波系统。
6. A High-Performance LC Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (LTCC) Technology [O] . Chen Li, Qiulin Tan, Chenyang Xue, 2014

机译：采用低温共烧陶瓷（LTCC）技术制造的高性能LC无线无源压力传感器
7. A High-Performance LC Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (LTCC) Technology [O] . Chen Li, Qiulin Tan, Chenyang Xue, 2014

机译：采用低温共烧陶瓷（LTCC）技术制造的高性能LC无线无源压力传感器

Micro force sensor fabricated in the LTCC technology

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