Success in Measurement the Lowest Off-state Current of Transistor in the World

机译：成功测量了世界上最低的晶体管断态电流

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An oxide semiconductor has a wide band gap and low off-state current. We focused on the off-state characteristics of a transistor including an oxide semiconductor and concentrated on measuring the off-state current. We fabricated a circuit TEG that had an In-Ga-Zn-Oxide TFT (IGZO-TFT) with a large channel width of 100,000 μm over a glass substrate and estimated the amount of electric charge flowing through the circuit TEG for a long time. As a result, we discovered that an IGZO-TFT had off-state current as small as 50yA/μm (at 85℃). We are the first to measure off-state current on the order of yA; "y" is the SI prefix representing 10~(-24).

机译：氧化物半导体具有宽带隙和低截止电流。我们专注于包括氧化物半导体的晶体管的关态特性，并专注于测量关态电流。我们在玻璃基板上制作了一个电路TEG，该电路TEG的In-Ga-Zn-氧化物TFT（IGZO-TFT）的通道宽度为100,000μm，并长时间估算流过该电路TEG的电荷量。结果，我们发现IGZO-TFT的关态电流小至50yA /μm（在85℃）。我们是第一个测量yA量级的断态电流的人； “ y”是代表10〜（-24）的SI前缀。

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来源
《2011 International conference on semiconductor technology for ultra large scale integrated circuits and thin film transistors (ULSIC vs. TFT)》|2011年|p.77-88|共12页
会议地点 Hong Kong(HK);Hong Kong(HK)
作者
Y. Sekine; K.Furutani; Y. Shionoiri; K. Kato; J. Koyama; S. Yamazaki;
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Semiconductor Energy Laboratory Co., Ltd., 398 Hase, Atsugi, Kanagawa, 243-0036, Japan;

Semiconductor Energy Laboratory Co., Ltd., 398 Hase, Atsugi, Kanagawa, 243-0036, Japan;

Semiconductor Energy Laboratory Co., Ltd., 398 Hase, Atsugi, Kanagawa, 243-0036, Japan;

Semiconductor Energy Laboratory Co., Ltd., 398 Hase, Atsugi, Kanagawa, 243-0036, Japan;

Semiconductor Energy Laboratory Co., Ltd., 398 Hase, Atsugi, Kanagawa, 243-0036, Japan;

Semiconductor Energy Laboratory Co., Ltd., 398 Hase, Atsugi, Kanagawa, 243-0036, Japan;

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正文语种 eng
中图分类大规模集成电路、超大规模集成电路;
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4. Success in Measurement the Lowest Off-state Current of Transistor in the World [C] . Y. Sekine, K. Furutani, Y. Shionoiri, International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors . 2011

机译：在测量世界中的最低晶体管的最低关断电流
5. SQUID array measurements of mesoscopic current noise and superconducting single-electron transistors. [D] . Steinbach, Andrew Harvey. 1998

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6. Measurement of finite-frequency current statistics in a single-electron transistor [O] . Niels Ubbelohde, Christian Fricke, Christian Flindt, -1

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7. The Origin of the High Off-State Current in p-Type Cu2O Thin Film Transistors [O] . Sanggil Han, Andrew J. Flewitt 2017

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Success in Measurement the Lowest Off-state Current of Transistor in the World

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