Comparable measurements and modeling of piezoelectric thin films for MEMS application

机译：MEMS应用的压电薄膜的可比测量和建模

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摘要

Accurate and reliable measurements of piezoelectric coefficients on thin films are required to perform thin film process development and compare different manufacturing techniques and quality especially in MEMS applications.

机译：需要精确可靠地测量薄膜上的压电系数，以执行薄膜工艺开发并比较不同的制造技术和质量，尤其是在MEMS应用中。

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来源
《2013 IEEE International Symposium on the Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy》|2013年|211-213|共3页
会议地点 Prague(CZ)
作者
Schmitz-Kempen Thorsten; Tiedke Stephan; Mardilovich Peter; Sivaramakrishnan Subramanian;
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作者单位

aixACCT Systems GmbH, Aachen, Germany;

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会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词
MEMS; PZT; characterization; laser interferometry; standardization; thin film;

机译：MEMS; PZT;特征化;激光干涉法;标准化;薄膜;;

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专利

1. Piezoelectric thin films for MEMS applications-A comparative study of PZT, 0.7PMN-0.3PT and 0.9PMN-0.1PT thin films grown on Si by r.f. magnetron sputtering [J] . Herdier R, Detalle M, Jenkins D, Sensors and Actuators, A. Physical . 2008,第1期

机译：用于MEMS的压电薄膜-r.f.法在Si上生长的PZT，0.7PMN-0.3PT和0.9PMN-0.1PT薄膜的比较研究磁控溅射
2. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications [J] . Kanno Isaku Japanese journal of applied physics . 2018,第4期

机译：压电MEMS：用于MEMS应用的铁电薄膜
3. Lead-free Mn-doped (K_(0.5),Na_(0.5))NbO_3 piezoelectric thin films for MEMS-based vibrational energy harvester applications [J] . Sung Sik Won, Joonhee Lee, Vineeth Venugopal, Applied Physics Letters . 2016,第23期

机译：用于基于MEMS的振动能量收集器应用的无铅Mn掺杂（K_（0.5），Na_（0.5））NbO_3压电薄膜
4. Comparable Measurements and Modeling of Piezoelectric Thin Films for MEMS application [C] . Thorsten Schmitz-Kempen, Stephan Tiedke, Peter Mardilovich, IEEE International Symposium on Applications of Ferroelectrics . 2013

机译：MEMS应用中压电薄膜的可比测量和建模
5. Micromachined sensor for stress measurement and micromechanical study of free-standing thin films for MEMS applications. [D] . Zhang, Ping. 2006

机译：用于应力测量的微机械传感器以及用于MEMS应用的自支撑薄膜的微机械研究。
6. Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films [O] . Martin Fischeneder, Martin Oposich, Michael Schneider, 2018

机译：具有集成压电薄膜的MEMS悬臂的可调谐Q因子
7. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications [O] . Isaku Kanno 2018

机译：压电MEMS：用于MEMS应用的铁电薄膜

Comparable measurements and modeling of piezoelectric thin films for MEMS application

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