摘要:电磁型微马达以其输出力矩大、运行寿命长、易于实用化的优点成为微机电系统、微型机器人和微型可动部件理想的驱动器。从微马达结构、气隙磁场、转子厚度、转子写入磁极数和定子绕组的层数对微马达输出力矩的影响进行了分析和讨论。%Electromagnetic micromotor is an ideal micro actuator for MEMS,micro robot and micro movable elements, because of it's large output torque, long lifetime and easy in practical applications. The effects of structure, gap magnetic field, rotor thickness, magnetic pole numbers of rotor and winding layers of stator of the micromotor on it's output torque are discussed in detail.
摘要:介绍了接触式X射线曝光对准系统的设计原理,对其关键部分(精密调整台、微位移控制、对准光学系统等)做了详细阐述,并进行了系统的精度分析。%The design principleof a contact X-ray exposure alignment systemis introduced. The Key parts of the system,such as precise adjustable stage, micro displacement control and optical alignment subsystem,are described in detail and the precision of the system is analyzed.
摘要:介绍一种全息光刻技术的基本原理,全息掩模复位精度的影响,全息光刻技术的优点及基本应用,并对全息光刻系统的设计考虑作了详细介绍,并给出部分实验结果。%The primary princeple, hologram mask reposition accuracy,advantages and applications of holographic microlithography are described. Some main aspects of holographic microlithography system design are presented. Also some experimental results are given
摘要:纳米多层膜的物理性能和力学性能的异常效应均与其调制结构有关。采用X射线能量分散谱仪(EDS)成分分析方法对不同调制周期和调制比的W/Mo纳米多层膜进行表征,并与透射电子显微分析(TEM)和x射线衍射分析(XRD)方法进行了比较。结果表明:采用EDS成分分析方法,可以表征纳米多层膜的调制比。EDS方法与XRD分析相结合,可以方便而准确地表征纳米多层膜的调制结构。%The abnormal effects of physical and mechanical properties ofnano-multilayers result from their modulation structure. The nano-multilayers of W/Mo with dif ferent modulation periods and ratios are characterized by EDS composition analysis and the results are compared with ones by TEM and XRD analysis. The research demonstrates that the modulation ratio of murtilayers can be identified by EDS Com position analysis. Combining with XRD technique, EDS Composition analysis method can Characterize the modulation structure of nano-multilayers accurately and conveniently.
摘要:The latest progress of semiconductor quantum dot and quantum wirematerials and their fabrication technology are reviewed.%综述了半导体量子点和量子线材料的最新发展动态及其制备技术。
摘要:The optical behavior of the phase diffractive microlens isanalyzed based on the scalar diffractive theory and the new approximate design method for binary diffractive microlens with subwavelength structure by the effective medium theory is presented. The phase-shift function of continuous surface-relief lens is discussed according to the concept ofquantified phase of scalar theory ,and then the surface function of the lens with subwavelength structures can be determined by the effective refraction expression of the effective medium theory.%分析了基于标量衍射理论的位相型衍射微透镜的光学行为,结合等效媒质理论提出了二元衍射微透镜的一种新的亚波长结构近似设计方法。根据标量理论位相量化的概念,分析连续浮雕透镜的相移函数,结合等效媒质理论的等效折射率表达式,可以确定亚波长结构透镜的面型函数。
摘要:由于衍射光学元件独特的色散特性及体积小、重量轻可进行复制等优点,它在国防、生产及科研等领域的作用越来越重要,应用于光学成像系统,不仅能改善系统成像质量,而且能实现系统的轻量化、小型化,增加系统设计的自由度。使用离子束刻蚀法制作的16阶菲涅耳透镜应用于折衍混合CCD相机;测量菲涅耳透镜的衍射效率并分析了影响衍射效率的因素。%As DOE have special dispersion, small volume, light weight andcan be relicated, it plays more and more important role in national defence, production and science research. Its application in optical imaging system can not only improve imaging quality, but also perform system's lightweight, miniaturization and increase degree of freedom in the design. The 16-step Fresnel lens had been fabricated by ion beam etching and it has been used in refractive-diffractive CCD camera. Its diffractive efficiency is measured and the factors to affect it are analyzed
摘要:A novel micro magnetometer based on electron tunneling isintroduced. The key fabrication processes are analyzed and studied by experiments. The dissolved wafer process is used to fabricate thin films and the structures can be patterned on both sides of the films , which enhance the ability of micromachining.%介绍了一种新型的基于隧道效应的微型磁强计,对其关键工艺进行了分析和实验研究。利用薄片溶解工艺制作了大尺寸的薄膜(3mm×1mm),并且在薄膜的两面都制作了图形结构,拓展了微机械工艺的加工能力
Materials Science: Electronic, Optical and Magnetic Materials;Materials Science: Surfaces, Coatings and Films;Engineering: Electrical and Electronic Engineering;