Comparative study of electrical properties of PbLaZrTiOx capacitors with Al-doped ZnO and ITO top electrodes

机译：掺铝ZnO和ITO顶电极的PbLaZrTiOx电容器电性能的比较研究

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PbLaZrTiOx (PLZT) thin films were deposited on Pt(111) substrate by the sol-gel method, then aluminum-doped zinc oxide (AZO) and indium tin oxide (ITO) top electrodes were deposited by pulsed laser deposition (PLD). We evaluated degradation characteristics by 3% hydrogen atmosphere annealing in 200°C, 1Torr. The polarization ratio of PLZT capacitors with 200 nm top electrodes thickness was maximum value at the same Pb contents. We also evaluated fatigue behavior by applying 10 V, 100 µs pulse width and 1 ms interval cycles. PLZT capacitors with AZO and ITO top electrodes were robust electrodes over 10⁵ cycles compared with Pt top electrodes.

机译：通过溶胶-凝胶法在Pt（111）衬底上沉积PbLaZrTiOx（PLZT）薄膜，然后通过脉冲激光沉积（PLD）沉积铝掺杂的氧化锌（AZO）和铟锡氧化物（ITO）顶部电极。我们通过在200°C，1Torr下进行3％氢气气氛退火来评估降解特性。在相同的Pb含量下，顶部电极厚度为200 nm的PLZT电容器的极化比为最大值。我们还通过施加10 V，100 µs脉冲宽度和1 ms间隔周期来评估疲劳行为。与Pt顶部电极相比，具有AZO和ITO顶部电极的PLZT电容器在10 ^{5 周期内是坚固的电极。}

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来源
《2013 IEEE International Symposium on the Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy》|2013年|360-362|共3页
会议地点 Prague(CZ)
作者
Takada Yoko; Tsuji Toru; Okamoto Naoki; Saito Takeyasu;
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作者单位

Dept. of Chem. Eng., Osaka Prefecture University, Sakai, JAPAN;

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原文格式 PDF
正文语种 eng
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关键词
conductive oxide electrode; fatigue; ferroelectric capacitor; hydrogen degradation; pulsed laser deposition;

机译：导电氧化物电极;疲劳;铁电电容器;氢降解;脉冲激光沉积;;

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1. Ferroelectric properties of (Pb,La)(Zr,Ti)O-3 capacitors employing Al-doped ZnO top electrodes prepared by pulsed laser deposition under different oxygen pressures [J] . Takada Yoko, Okamoto Naoki, Saito Takeyasu, Japanese journal of applied physics . 2016,第6S3期

机译：（Pb，La）（Zr，Ti）O-3电容器的Al2掺杂的ZnO顶电极通过在不同氧气压力下脉冲激光沉积制备的铁电性能
2. Effect of Al-doped ZnO or Sn-doped In2O3 electrode on ferroelectric properties of (Pb,La)(Zr,Ti)O-3 capacitors [J] . Takada Yoko, Tsuji Toru, Okamoto Naoki, Japanese journal of applied physics . 2015,第5s期

机译：铝掺杂ZnO或锡掺杂In2O3电极对（Pb，La）（Zr，Ti）O-3电容器铁电性能的影响
3. Photovoltaic properties of BiFeO_3 thin film capacitors by using Al-doped zinc oxide as top electrode [J] . Wen Dong, Yiping Guo, Bing Guo, Materials Letters . 2013,第jana15期

机译：以铝掺杂氧化锌为上电极的BiFeO_3薄膜电容器的光伏性能
4. Comparative study of electrical properties of PbLaZrTiOx capacitors with Al-doped ZnO and ITO top electrodes [C] . Yoko Takada, Toru Tsuji, Naoki Okamoto, IEEE International Symposium on Applications of Ferroelectrics . 2013

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Comparative study of electrical properties of PbLaZrTiOx capacitors with Al-doped ZnO and ITO top electrodes

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