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首页> 外文会议>2013 IEEE International Symposium on the Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy >Piezoelectric thick film sensors: Fabrication and characterization
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Piezoelectric thick film sensors: Fabrication and characterization

机译：压电厚膜传感器：制造与表征

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摘要

The screen printing of piezoelectric materials such as Pb(Zrx,Ti1−x)O3 (PZT) offers a wide range of possible applications for the development of acoustic sensors and the measurement of small size deformations. Material properties characterizations of these PZT thick-films are essential for devices design and applications. To optimize the fabrication process, we measured the electrical properties for different ranges of frequencies and temperature -from 10µHz up to 13MHz between 30 and 400°C-of these thick-films. The piezoelectric coefficients d33 and pyroelectric coefficient are also investigated. Various thicknesses of (PZT) thick films were deposed, up to 60 µm by screen printing process. The deposits were obtained by superposition of several layers thick of 20 microns. We implemented different screen printing processes firing and co-firing duration, controlled temperature rate to bring the better piezoelectric material as possible. We will highlight the use of these thick films to determine liquid properties.
机译：压电材料（例如Pb（Zrx，Ti1-x）O3（PZT））的丝网印刷为声学传感器的开发和小尺寸变形的测量提供了广泛的可能应用。这些PZT厚膜的材料特性表征对于器件设计和应用至关重要。为了优化制造工艺，我们测量了这些厚膜在不同频率和温度范围（从10µHz到13MHz在30至400°C之间）的电性能。还研究了压电系数d33和热电系数。通过丝网印刷工艺沉积各种厚度的（PZT）厚膜，最大厚度为60 µm。通过叠加几层厚度为20微米的涂层获得沉积物。我们实施了不同的丝网印刷工艺，烧结和共烧结时间，受控的温度速率，以尽可能带来更好的压电材料。我们将重点介绍使用这些厚膜来确定液体性质。

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