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A simulation based optimization approach for scheduling of a semiconductor manufacturing system

机译:用于半导体制造系统调度的基于仿真的优化方法

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As an important and challenging problem, the scheduling of semiconductor manufacturing is a hot topic in both engineering and academic field. Its purpose is to satisfy production constraints on time, cost and quality while optimizing some performance indexes like cycle-time, movement, WIP and etc. However, due to complexities of semiconductor manufacturing system, conventional technologies and/or methods are hard to solve this kind of scheduling problem. A new scheduling approach based on simulation based optimization (SBO) is proposed in this paper. For the issue of the high computational cost including both CPU time and memory space which could hinder the application of SBO scheduling in practice, a distributed/parallel architecture is discussed. With genetic algorithm as an optimization algorithm, the proposed SBO based scheduling approach for semiconductor manufacturing system is tested on its feasibility and effectiveness.
机译:作为重要且具有挑战性的问题,半导体制造的调度是工程和学术领域中的热门话题。其目的是在优化诸如循环时间,移动,WIP等一些性能指标的同时满足时间,成本和质量上的生产约束。然而,由于半导体制造系统的复杂性,常规技术和/或方法难以解决这一问题。调度问题。提出了一种基于仿真优化的调度方法。针对包括CPU时间和内存空间在内的高计算量问题,这可能会阻碍SBO调度在实践中的应用,讨论了一种分布式/并行体系结构。以遗传算法为优化算法,对基于SBO的半导体制造系统调度方法进行了可行性和有效性测试。

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