Development of solution-derived diffusion barrier layer for back-contact crystalline silicon solar cell

机译：用于背接触式晶体硅太阳能电池的溶液衍生扩散阻挡层的开发

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In order to reduce the back-contact silicon solar cell manufacturing process cost, polysilazane solution is used to form SiO2 diffusion barrier layer in this study. The thickness and refractive index of SiO2 film is evaluated by spectroscopic ellipsometer measurement. Sheet resistance measurement and SIMS measurement revealed that polysilazane-derived SiO2 layer presents excellent barrier effect for boron and phosphorous diffusion process, while SiO2 deposited by plasma chemical vapor deposition is available for only phosphorous diffusion process.

机译：为了降低背接触式硅太阳能电池的制造工艺成本，本研究采用聚硅氮烷溶液形成SiO2扩散阻挡层。 SiO 2膜的厚度和折射率通过椭圆偏振光谱仪测量来评估。薄层电阻测量和SIMS测量表明，聚硅氮烷衍生的SiO 2层对硼和磷的扩散过程具有优异的阻挡作用，而通过等离子体化学气相沉积法沉积的SiO 2仅可用于磷的扩散过程。

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来源
《2014 IEEE International Meeting for Future of Electron Devices, Kansai》|2014年|1-2|共2页
会议地点 Kyoto(JP)
作者
Jiang Yunjian; Ishikawa Yasuaki; Yoshinaga Seiya; Honda Tatsuki; Uraoka Yukiharu;
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作者单位

Graduate School of Material Science Nara Institute of Science and Technology (NAIST) 8916-5 Takayama, Ikoma, Nara 630-0192, Japan;

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原文格式 PDF
正文语种 eng
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关键词
Boron; Coatings; Electrical resistance measurement; Films; Photovoltaic cells; Refractive index; Silicon; back-contact silicon solar cell; diffusion barrier; polysilazane coating; process cost;

机译：硼;涂料；电阻测量；电影；光伏电池；折射率硅;背接触式硅太阳能电池；扩散势垒聚硅氮烷涂料；流程成本；;

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1. Development of Screen-Printed Texture-Barrier Paste for Single-Side Texturization of Interdigitated Back-Contact Silicon Solar Cell Applications [J] . Chi-Cheng Chen, Chin-Lung Cheng, Thou-Jen Whang, Materials . 2013,第10期

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2. Enhanced passivation at amorphous/crystalline silicon interface and suppressed Schottky barrier by deposition of microcrystalline silicon emitter layer in silicon heterojunction solar cells [J] . Applied Physics Letters . 2014,第11期

机译：通过在硅异质结太阳能电池中沉积微晶硅发射极层，增强了非晶/晶体硅界面处的钝化并抑制了肖特基势垒
3. Enhanced passivation at amorphous/crystalline silicon interface and suppressed Schottky barrier by deposition of microcrystalline silicon emitter layer in silicon heterojunction solar cells [J] . Omid Madani Ghahfarokhi, Karsten von Maydell, Carsten Agert Applied Physics Letters . 2014,第11期

机译：通过在硅异质结太阳能电池中沉积微晶硅发射极层，增强了非晶/晶体硅界面处的钝化并抑制了肖特基势垒
4. Development of solution-derived diffusion barrier layer for back-contact crystalline silicon solar cell [C] . Jiang Yunjian, Ishikawa Yasuaki, Yoshinaga Seiya, Institute of Electrical and Electronics Engineers International Meeting for Future of Electron Devices, Kansai . 2014

机译：用于背面晶体硅太阳能电池溶液衍生的扩散阻挡层的研制
5. Symmetry and Dopant Diffusion in Inverted Nanopyramid Arrays for Thin Crystalline Silicon Solar Cells [D] . Han, Seok Jun. 2019

机译：用于薄晶体硅太阳能电池倒纳米滤网阵列中的对称性和掺杂剂扩散
6. Silica-sol-based spin-coating barrier layer against phosphorous diffusion for crystalline silicon solar cells [O] . Abdullah Uzum, Ken Fukatsu, Hiroyuki Kanda, 2014

机译：防止磷扩散的硅溶胶基旋涂阻挡层用于晶体硅太阳能电池
7. Silica-sol-based spin-coating barrier layer against phosphorous diffusion for crystalline silicon solar cells [O] . 2014

机译：硅溶胶基旋涂阻挡层，可防止磷扩散，用于晶体硅太阳能电池
8. Back-Contact Crystalline-Silicon Solar Cells and Modules [R] . Bode, M. D. , Garrett, S. E. , Gee, J. M. , 1999

机译：背接触晶体硅太阳能电池和模块

Development of solution-derived diffusion barrier layer for back-contact crystalline silicon solar cell

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