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首页> 外文会议>2014 International Symposium on Optomechatronic Technologies >A Scanning Micro-Mirror with an Adjustable Focal Length for Endoscope Applications
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A Scanning Micro-Mirror with an Adjustable Focal Length for Endoscope Applications

机译：内窥镜应用可调节焦距的扫描微镜

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In this work, we report design, fabrication and characterization of a 3-D scanning micro-mirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. The micro-mirror consists of a biaxial gimbal structure for 2-D beam scanning, and a deformable mirror membrane surface to achieve focus control. The micro-mirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <;40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <;100 V applied bias. We have also obtained imaging results using a micro-mirror with beam scanning-only function in both time-domain and spectral-domain optical coherence tomography systems.
机译：在这项工作中，我们报告了3-D扫描微镜器件的设计，制造和表征，该器件在使用微机电系统（MEMS）技术的同一器件中将2-D束扫描与聚焦控制相结合。微镜由用于二维光束扫描的双轴万向节结构和可变形的镜膜表面组成，以实现聚焦控制。具有800微米直径的微镜被设计为足够紧凑和有效，因此可以将其合并到内窥镜成像探头中。使用聚焦跟踪MEMS扫描镜，我们在谐振时<; 40 V激励电压下实现了> 16度的光学扫描范围，并且在施加<; 100 V偏压时，无穷远和25 mm之间的可调焦距。我们还获得了在时域和谱域光学相干断层扫描系统中使用仅具有光束扫描功能的微镜的成像结果。

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