Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

机译：超细精加工表面区域形貌的总角度分辨散射特性

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In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

机译：在这项研究中，建议基于光散射方法的总角度分辨散射（T-ARS）。为了使用T-ARS方法表征具有纳米缺陷的表面区域形貌，我们开发了一种自动3D散射测量系统，该系统可以检测整个方向上来自超光滑表面的散射光。为了验证T-ARS方法的可行性，使用具有超细精加工表面的镀铂玻璃透镜模具对基于3D光散射测量的表面形貌进行了分析。

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来源
《2014 International Symposium on Optomechatronic Technologies》|2014年|200-204|共5页
会议地点 Seattle WA(US)
作者
Takaya Yasuhiro; Michihata Masaki; Hayashi Terutake;
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作者单位

Dept. of Mech. Eng., Osaka Univ., Suita, Japan;

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原文格式 PDF
正文语种 eng
中图分类
关键词
areal-topography; glass lens mold; laser light scattering; surface inspection; total angle-resolved scattering;

机译：平面形貌;玻璃透镜模具;激光散射;表面检查;全角分辨散射;

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2. 表面活性剂对超细镍粉分散性及形貌的影响(英文) [J] . 黄国勇, 徐盛明, 李林艳, 中国有色金属学报：英文版 . 2014,第011期
3. In Situ Characterization Of Block Copolymer Ordering On Chemically Nanopatterned Surfaces By Time-resolved Small Angle X-ray Scattering [J] . K. O. Stuen, C. Liu, A. M. Welander, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2008,第6期

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6. Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography [C] . Takaya Yasuhiro, Michihata Masaki, Hayashi Terutake International Symposium on Optomechatronic Technologies . 2014

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Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

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