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首页> 外文会议>2015 IEEE Student Symposium in Biomedical Engineering amp; Sciences >Array design consideration of the MEMS vibration energy harvester cantilever based structure: Top proof mass vs back etch mass vs interdigitated electrode design
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Array design consideration of the MEMS vibration energy harvester cantilever based structure: Top proof mass vs back etch mass vs interdigitated electrode design

机译：基于MEMS振动能量收集器悬臂结构的阵列设计考虑因素：顶级质量vs后蚀刻质量vs叉指电极设计

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摘要

Unexploited ambient vibration is scattered in the environment such as in the building, transportation, equipment or on the street. This untapped waste energy is low and varying in frequency and amplitude value. The wideband frequency MEMS Vibration Energy Harvesting (MVEH) is one of the preferable designs in harvesting or scavenging this ambient vibration energy. The energy harvested will be used for powering sensor node for Wireless Sensor Network (WSN) application. In this paper, three different design of the wideband cantilever based structure MVEH is simulated and the result of the simulated natural frequency, stress, amplitude and potential is plotted and discussed. The TPM design is the best choice in delivering high energy and small in size compare with the BEM and ITE design.
机译：未利用的环境振动会散布在建筑物，交通运输，设备或街道等环境中。这种未开发的浪费的能量很低，并且频率和幅度值都在变化。宽带频率MEMS振动能量收集（MVEH）是收集或清除这种环境振动能量的首选设计之一。收集的能量将用于为无线传感器网络（WSN）应用程序的传感器节点供电。本文对宽带悬臂结构MVEH的三种不同设计进行了仿真，并绘制了仿真的自然频率，应力，振幅和电势的结果，并进行了讨论。与BEM和ITE设计相比，TPM设计是提供高能量和小尺寸的最佳选择。

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