Acoustic Actuation of Suspended Graphene For Linear Excitation of 2D NEMS

机译：二维NEMS线性激励的悬浮石墨烯的声激励

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In this paper, we present the fabrication of on-chip piezoelectric acoustic actuation for 2D materials. Acoustic actuation is achieved at device level through patterning of aluminum nitride (AlN) thin film at wafer scale. Two piezoelectric stacks consisting of a 100 nm-thick AlN layer sandwiched between 25 nm-thick platinum (Pt) and molybdenum (Mo) electrodes are fabricated close to the suspended 2D material such as graphene. The graphene nanoelectromechanical resonator is first actuated electrostatically using highly doped silicon (Si) back gate. Due to the effect of damping on amplitude, the frequency response curves do not lie on top of each other. Nonetheless, when actuated through the on-chip piezoelectric stack, the various frequency response curves lie on top of each other, indicating a linearly damped system. We also find that the acoustic actuation technique to be less dissipative than the electrostatic one.

机译：在本文中，我们介绍了用于2D材料的片上压电声致动器的制造。通过在晶圆级对氮化铝（AlN）薄膜进行构图，可以在设备级别实现声激励。紧靠悬浮的2D材料（例如石墨烯）制造两个压电堆栈，这些堆栈由夹在25 nm厚的铂（Pt）和钼（Mo）电极之间的100 nm厚的AlN层组成。首先使用高掺杂硅（Si）背栅以静电方式激活石墨烯纳米机电谐振器。由于阻尼对振幅的影响，频率响应曲线不会彼此重叠。但是，当通过片上压电叠层驱动时，各种频率响应曲线相互重叠，表明存在线性阻尼系统。我们还发现，声学致动技术的耗散性小于静电致动技术。

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来源
《2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems amp; Eurosensors XXXIII》|2019年|2380-2383|共4页
会议地点 Berlin(DE)
作者
Muhammad Faizan; Marsha M. Parmar; Philip X.-L. Feng; Luis Guillermo Villanueva;
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作者单位

Advanced NEMS Laboratory, EPFL, Lausanne, Switzerland;

Advanced NEMS Laboratory, EPFL, Lausanne, Switzerland;

Electrical Engineering, Case Western Reserve University, Cleveland, OH, 44106, USA;

Advanced NEMS Laboratory, EPFL, Lausanne, Switzerland;

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原文格式 PDF
正文语种 eng
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Two dimensional displays; Aluminum nitride; Graphene; III-V semiconductor materials; Electrodes; Acoustics; Nanoelectromechanical systems;

机译：二维显示器氮化铝石墨烯III-V半导体材料电极声学纳米机电系统;

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专利

1. Non-linear vibration suppression of a composite panel subject to random acoustic excitation using piezoelectric actuators [J] . Y. Y. Lee, X. Guo Mechanical systems and signal processing . 2007,第2期

机译：使用压电致动器的受到随机声激励作用的复合板的非线性振动抑制
2. Non-linear vibration suppression of a composite panel subject to random acoustic excitation using piezoelectric actuators [J] . Y.Y. Lee, X. Guo Mechanical systems and signal processing . 2007,第2期

机译：使用压电致动器的受到随机声激励作用的复合板的非线性振动抑制
3. Acoustically actuated ultra-compact NEMS magnetoelectric antennas [J] . Tianxiang Nan, Hwaider Lin, Yuan Gao, Nature Communications . 2017,第1期

机译：声激励超紧凑NEMS磁电天线
4. Acoustic Actuation of Suspended Graphene For Linear Excitation of 2D NEMS [C] . Muhammad Faizan, Marsha M. Parmar, Philip X.-L. Feng, International Conference on Solid-State Sensors, Actuators and Microsystems . 2019

机译：悬浮石墨烯的声学致动，用于2D NEM的线性激发
5. Acoustically Actuated Ultra-Compact NEMS Magnetoelectric Antennas [D] . Lin, Hwaider. 2018

机译：声学驱动的超紧凑型NEMS磁电天线
6. Acoustically actuated ultra-compact NEMS magnetoelectric antennas [O] . Tianxiang Nan, Hwaider Lin, Yuan Gao, -1

机译：声激励超紧凑NEMS磁电天线
7. Stacking of nanocrystalline graphene for nano-electro-mechanical (NEM) actuator applications [O] . Kulothungan Jothiramalingam, Marek E. Schmidt, Muruganathan Manoharan, 2018

机译：纳米电力（NEM）执行器应用的纳米晶石墨烯堆叠

Acoustic Actuation of Suspended Graphene For Linear Excitation of 2D NEMS

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