Out-Of-Plane Direction Thermal Actuater for Optical Mems

机译：光学膜片的平面外方向热执行器

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This paper shows two types of novel out-of-plane direction thermal actuators composed of only single crystal silicon for optical MEMS and also introduces two application examples. These thermal actuators have advantages of large force at low voltage, large displacement, high reliability and easy fabrication compared with other types of actuators. The first type of actuators could tilt the micro mirror with 1 mm in diameter 9.4-degree at 3.3 V. The latching mechanism by using the second type of actuators could strongly hold the optical shutter with 0.51 mm in diameter after 0.65 mm displacement. The latched state was kept over operational shock and vibration regulated by the reliability standard for optical communication devices.

机译：本文展示了两种仅由单晶硅构成的新颖平面外方向热执行器，用于光学MEMS，并介绍了两个应用示例。与其他类型的执行器相比，这些热执行器具有在低压下具有大的力，大的位移，高的可靠性以及易于制造的优点。第一种类型的致动器可以在3.3 V电压下倾斜直径为1毫米的微镜9.4度。使用第二种类型的致动器的闩锁机构可以在位移0.65 mm后牢固地固定直径为0.51毫米的光学快门。闩锁状态保持在受光通信设备可靠性标准规定的操作冲击和振动之上。

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来源
《2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems amp; Eurosensors XXXIII》|2019年|1556-1559|共4页
会议地点 Berlin(DE)
作者
Mario Kiuchi; Naoki Okimoto; Yasuyuki Hirata; Gen Matsuoka; Osamu Torayashiki;
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作者单位

MEMS Sensor Systems Department, Sumitomo Precision Products co., ltd., JAPAN;

MEMS Sensor Systems Department, Sumitomo Precision Products co., ltd., JAPAN;

MEMS Sensor Systems Department, Sumitomo Precision Products co., ltd., JAPAN;

MEMS Sensor Systems Department, Sumitomo Precision Products co., ltd., JAPAN;

MEMS Sensor Systems Department, Sumitomo Precision Products co., ltd., JAPAN;

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会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词
Actuators; Mirrors; Gold; Lithography; Optical sensors; Micromechanical devices; Surface treatment;

机译：执行器;镜子;金;光刻;光学传感器;微机械设备;表面处理;;

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专利

1. Large Out-of-Plane Deflection MEMS Actuators for Optical Applications [J] . David Torres, Sarah Dooley, LaVern A. Starman Proceedings . 2018,第13期

机译：适用于光学应用的大型面外偏转MEMS执行器
2. An electrostatic MEMS spring actuator with large stroke and out-of-plane actuation [J] . Fangrong Hu, Weiming Wang, Jun Yao Journal of Micromechanics and Microengineering . 2011,第11期

机译：具有大行程和平面外驱动的静电MEMS弹簧驱动器
3. Influence of target design on the damage threshold for optically powered MEMS thermal actuators [J] . Phinney LM, Serrano JR Sensors and Actuators, A. Physical . 2007,第2期

机译：目标设计对光驱MEMS热执行器损坏阈值的影响
4. Out-Of-Plane Direction Thermal Actuater for Optical Mems [C] . Mario Kiuchi, Naoki Okimoto, Yasuyuki Hirata, International Conference on Solid-State Sensors, Actuators and Microsystems . 2019

机译：用于光学MEMS的平面外方向热执行器
5. Analysis and optimization of MEMS out-of-plane thermal actuators. [D] . Lee, Jeongkwan. 2003

机译：MEMS平面外热执行器的分析和优化。
6. An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications [O] . Chikako Sano, Manabu Ataka, Gen Hashiguchi, 2020

机译：用于声换能器的驻极体增强型低压MEMS静电平面外执行器
7. Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation [O] . Sandner, T., Grasshoff, T., Schenk, H., 2011

机译：平面外平移式mEms致动器，具有非常大的行程，用于光程长度调制
8. Actuator for Out-of-Plane MEMS Devices [R] . Johnson, A. D. , Gupta, V. 2001

机译：用于平面外mEms器件的执行器

Out-Of-Plane Direction Thermal Actuater for Optical Mems

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