Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique

机译：薄膜转移技术制备腔封光学干涉表面应力生物传感器

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

We developed a surface stress sensor based on a MEMS Fabry-Perot interferometer with cavity-sealed structure by transfer technique of nanometer-thick parylene sheet for highly sensitive label-free biosensing. The proposed MEMS interferometer can measure the membrane deflection caused by target molecule adsorption as the spectral shift. The proposed cavity-sealed optical interferometer can prevent physical adsorption to the backside of membrane and refractive index drift in the cavity, leading to improvement of sensitivity. We successfully obtained the spectral shift of 77 nm in 10 minutes with the color change associated with the antigen-antibody reaction with a concentration of 1 ng/ml, which improved by 16.7-fold compared with the conventional sensor.

机译：我们开发了一种基于MEMS Fabry-Perot干涉仪的表面应力传感器，该传感器具有腔密封结构，通过纳米厚度的聚对二甲苯片的转移技术实现了高度灵敏的无标签生物传感。所提出的MEMS干涉仪可以测量由目标分子吸附引起的膜偏斜作为光谱偏移。提出的腔密封光学干涉仪可以防止物理吸附到膜的背面和折射率在腔中漂移，从而提高灵敏度。我们成功地在10分钟内获得了77 nm的光谱偏移，并且与抗原-抗体反应相关的颜色发生了变化，浓度为1 ng / ml，与传统传感器相比提高了16.7倍。

著录项

来源
《2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems amp; Eurosensors XXXIII》|2019年|182-185|共4页
会议地点 Berlin(DE)
作者
Toshiaki Takahashi; Yong-Joon Choi; Satoshi Maruyam; Miki Taki; Kazuaki Sawada; Kazuhiro Takahashi;
展开▼
作者单位

Toyohashi University of Technology, Aichi, JAPAN;

Toyohashi University of Technology, Aichi, JAPAN;

Toyohashi University of Technology, Aichi, JAPAN;

Toyohashi University of Technology, Aichi, JAPAN;

Toyohashi University of Technology, Aichi, JAPAN;

Toyohashi University of Technology, Aichi, JAPAN;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类
关键词
Optical interferometry; Stress; Biomembranes; Optical device fabrication; Optical sensors; Adsorption; Optical films;

机译：光学干涉法;应力;生物膜;光学器件制造;光学传感器;吸附;光学膜;;

相似文献

外文文献
中文文献
专利

1. Fabrication of ordered mesoporous thin films for optical waveguiding and interferometric chemical sensing [J] . Qi ZM, Honma I, Zhou HS The journal of physical chemistry, B. Condensed matter, materials, surfaces, interfaces & biophysical . 2006,第22期

机译：用于光波导和干涉化学传感的有序介孔薄膜的制备
2. Optical and structural characterization of ZnO thin films and fabrication of bulk acoustic wave resonator (BAW) for the realization of gas sensors by stacking ZnO thin layers fabricated by e-beam evaporation and rf magnetron sputtering techniques [J] . Atanas JP, Al Asmar R, Khoury A, Sensors and Actuators, A. Physical . 2006,第1期

机译：ZnO薄膜的光学和结构表征以及通过堆叠由电子束蒸发和射频磁控溅射技术制成的ZnO薄层来实现气体传感器的体声波谐振器（BAW）的制造
3. MONITORING INTRINSIC STRESS INDUCED IN THE CdSe THIN FILMS DURING DEPOSITION BY DOUBLE EXPOSURE HOLOGRAPHIC INTERFEROMETRIC TECHNIQUE [J] . C. S. Pawar, V. J. Fulari, M. B. Dongare Chalcogenide Letters . 2010,第7期

机译：二次曝光全息干涉技术监测沉积过程中CdSe薄膜的内在应力
4. Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique [C] . Toshiaki Takahashi, Yong-Joon Choi, Satoshi Maruyam, International Conference on Solid-State Sensors, Actuators and Microsystems amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp;amp; Eurosensors . 2019

机译：薄膜转移技术用腔密封光学干涉表面应力生物传感器的制造
5. Low-temperature oxidizing plasma surface modification and composite polymer thin-film fabrication techniques for tailoring the composition and behavior of polymer surfaces. [D] . Tompkins, Brendan D. 2014

机译：低温氧化等离子体表面改性和复合聚合物薄膜制造技术，用于定制聚合物表面的组成和行为。
6. Theoretical Study on Synchronous Characterization of Surface and Interfacial Mechanical Properties of Thin-Film/Substrate Systems with Residual Stress Based on Pressure Blister Test Technique [O] . Zhi-xin Yang, Jun-yi Sun, Ke Li, 2018

机译：基于水泡试验技术的残余应力薄膜/基体系统表面和界面力学性能同步表征的理论研究
7. Fabrication of Ordered Mesoporous Thin Films for Optical Waveguiding and Interferometric Chemical Sensing [O] . -1

机译：用于光波导和干涉化学感测的有序介孔薄膜的制造
8. Surface Relief Gratings of 3200-A-Period Fabrication Techniques and Influence on Thin-Film Growth. [R] . Flanders, D. C., Smith, H. I. 1977

机译：3200-a周期制备技术的表面浮雕光栅及其对薄膜生长的影响。

Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique

摘要

著录项

相似文献

相关主题

期刊订阅