Resolution of Permeation Issues in Liquid-handling Systems

机译：解决液体处理系统中的渗透问题

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Dissolved gases and bubbles in liquids can be contaminants. As contaminants, they can reduce manufacturing yield or result in failure of chemical-handling systems. They are often the result of permeation of the contaminant species into areas where they are not wanted. This paper addresses two of these situations and shows how the effects can be mitigated.

机译：液体中溶解的气体和气泡可能是污染物。作为污染物，它们会降低生产良率或导致化学处理系统失效。它们通常是污染物进入不想要的区域的结果。本文介绍了其中两种情况，并说明了如何减轻影响。

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《22nd Annual Semiconductor Pure Water and Chemicals Conference Feb 17-19, 2003 Santa Clara, CA》|2003年|p.131-153|共23页
会议地点 Santa Clara CA(US)
作者
Don Grant;
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CT Associates, Inc. 10777 Hampshire Ave S, Bloomington, MN 55438;

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原文格式 PDF
正文语种 eng
中图分类化学工业;
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机译：清洗过程中集成了去污步骤，减少了液体处理系统中的残留
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机译：在清洗过程中集成了去污步骤，减少了液体处理系统中的残留
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Resolution of Permeation Issues in Liquid-handling Systems

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