Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency

机译：修复湿法蚀刻，以低成本制造高效率的高选择性亚波长光栅

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Beside giving rise to high optical contrast effects and high-selectivity filtering, resonant DOE and grating elements lend themselves, and for the same reason related to the existence of resonances, to a manufacturing technology resorting to very low cost plain old wet etching processes even for submicron features.

机译：除了产生高的光学对比效果和高选择性滤光之外，共振的DOE和光栅元件也因与共振的存在相关的原因而适用于一种制造技术，该制造技术即使在制造过程中也要采用非常低成本的普通旧式湿法蚀刻工艺。亚微米功能。

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《2nd EOS conference on manufacturing of optical components 2011》|2011年|p.95-96|共2页
会议地点 Munich(DE);Munich(DE)
作者
S. Tonchev; Th. Kaempfe; O. Parriaux;
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作者单位

Universityof Lyon, Lab. H. Curien UMR CNRS 5516, Saint-Etienne, 42000, France,On leave from ISSP Bulgarian Academy of Sciences, Sofia, 1784, Bulgaria;

Universityof Lyon, Lab. H. Curien UMR CNRS 5516, Saint-Etienne, 42000, France;

Universityof Lyon, Lab. H. Curien UMR CNRS 5516, Saint-Etienne, 42000, France;

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正文语种 eng
中图分类光学仪器;
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2. Simple and low-cost nanofabrication process of nanoimprint templates for high-quality master gratings: Friction-induced selective etching [J] . Wang Hongbo, Yu Bingjun, Jiang Shulan, Applied Surface Science . 2018,第OCTa1期

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3. Process optimization of selective wet etching for fabrication of high-aspect-ratio and uniform multilayer grating reference materials [J] . Longfei Zhang, Xingrui Wang, Xinbin Cheng, Journal of microanolithography, MEMS, and MOEMS . 2018,第4期

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4. Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency [C] . S. Tonchev, Th. Kaempfe, O. Parriaux EOS conference on manufacturing of optical components . 2011

机译：湿法蚀刻湿法蚀刻的高效率高度选择性亚波长
5. Fundamental studies in selective wet etching and corrosion processes for high-performance semiconductor devices. [D] . Mistkawi, Nabil George. 2010

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8. Design, Manufacturing and Testing of Dual-Layer Frequency-Selective Subwavelength-Grid Polarizers of Enhanced Performance in THz Band [R] . Yurchenko, V. B. 2009

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Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency

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