Precise processing of transparent dielectrics by pulsed laser radiation

机译：脉冲激光辐射对透明电介质的精确处理

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This presentation gives an overview of the current status of advanced laser techniques for precise surface etching of transparent material. The main characteristics as the etching rate, the roughness, and the subsurface damage are discussed and selected examples for surface patterning/figuring are presented.

机译：本演讲概述了用于透明材料的精确表面蚀刻的高级激光技术的当前状态。讨论了蚀刻速率，粗糙度和亚表面损伤等主要特征，并给出了用于表面图案/图形化的选定示例。

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《2nd EOS conference on manufacturing of optical components 2011》|2011年|p.37-38|共2页
会议地点 Munich(DE);Munich(DE)
作者
K. Zimmer; R. Boehme; M. Ehrhardt; P. Lorenz;
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作者单位

Leibniz-Institute of Surface Modification, Phys. Dep.,Permoserstr. 15, 04318 Leipzig, Germany;

Leibniz-Institute of Surface Modification, Phys. Dep.,Permoserstr. 15, 04318 Leipzig, Germany;

Leibniz-Institute of Surface Modification, Phys. Dep.,Permoserstr. 15, 04318 Leipzig, Germany;

Leibniz-Institute of Surface Modification, Phys. Dep.,Permoserstr. 15, 04318 Leipzig, Germany;

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原文格式 PDF
正文语种 eng
中图分类光学仪器;
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1. Generation of mid-IR and visible radiation from four-wave amplification of ultrashort laser pulses in transparent dielectrics [J] . Pe?ano J.R., Gordon D.F., Hafizi B. Journal of the Optical Society of America, B. Optical Physics . 2013,第3期

机译：透明电介质中超短激光脉冲的四波放大产生中红外和可见辐射
2. Processing of transparent and dielectric materials with deep UV-and VUV excimer laser radiation [J] . H. K. Tonshoff, A. Ostendorf, K. Korber, International Journal of Electrical Machining . 2001,第6期

机译：使用深紫外和VUV准分子激光辐射处理透明和介电材料
3. Dynamics of surface processes in a transparent dielectric exposed to laser radiation [J] . Vasilev SV, Nedolugov VI Quantum electronics . 2007,第11期

机译：暴露于激光辐射的透明电介质中表面过程的动力学
4. Precise processing of transparent dielectrics by pulsed laser radiation [C] . K. Zimmer, R. Boehme, M. Ehrhardt, EOS conference on manufacturing of optical components . 2011

机译：脉冲激光辐射精确加工透明电介质
5. Controlled material modification of transparent dielectrics by femtosecond laser pulses. [D] . Gertsvolf, Marina. 2009

机译：飞秒激光脉冲对透明电介质的受控材料改性。
6. Direct-writing of PbS nanoparticles inside transparent porous silica monoliths using pulsed femtosecond laser irradiation [O] . Abdallah Chahadih, Hicham El Hamzaoui, Rémy Bernard, 2011

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7. Irradiation of successive pulsed and continuous-wave lasers on a transparent polyethylene film [O] . Changqing Song, Kai Han, Xiao Li, 2020

机译：透明聚乙烯膜上连续脉冲和连续波激光的照射

Precise processing of transparent dielectrics by pulsed laser radiation

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