Noncontacting Surface Roughness Measurement using the Optical Stylus Method

机译：使用光学测针法的非接触式表面粗糙度测量

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A surface-roughness measurement system using an optical stylus that is robust to irregularities in the intensity distribution of reflected light is proposed. This measurement system consists of a displacement-measurement optical system using focus-error detection and a system that only measures intensity irregularities. Measurements were taken of a ground roughness-standard specimen for which intensity irregularities are easily attained, and it was found that the proposed measurement system could remove the effects of intensity irregularities and obtain a surface profile close to that obtained by a mechanical stylus.

机译：提出了使用光学笔的表面粗糙度测量系统，该光学笔对反射光的强度分布中的不规则性具有鲁棒性。该测量系统由使用聚焦误差检测的位移测量光学系统和仅测量强度不规则性的系统组成。对容易达到强度不规则性的地面粗糙度标准样品进行了测量，发现所提出的测量系统可以消除强度不规则性的影响并获得接近于由机械笔获得的表面轮廓。

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《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.440-443|共4页
会议地点 Turin(IT)
作者
H. Fukatsu; Y. Nakanishi; K. Asahina; S. Hirai;
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作者单位

Tokyo Metropolitan College of Technology, Japan;

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原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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1. COMPARISON OF RESULTS OF SURFACE TEXTURE MEASUREMENT OBTAINED WITH STYLUS METHODS AND OPTICAL METHODS [J] . Pawel Pawlus, Rafal Reizer, Michal Wieczorowski Metrology and Measurement Systems: Metrologia i Systemy Pomiarowe . 2018,第3期

机译：用触控法和光学方法获得表面纹理测量结果的比较
2. COMPARISON OF RESULTS OF SURFACE TEXTURE MEASUREMENT OBTAINED WITH STYLUS METHODS AND OPTICAL METHODS [J] . Pawel Pawlus, Rafal Reizer, Michal Wieczorowski Metrology and Measurement Systems: Metrologia i Systemy Pomiarowe . 2018,第3期

机译：用触控法和光学方法获得表面纹理测量结果的比较
3. Comparison of optical and stylus methods for measurement of surface texture [J] . T. V. Vorburger, H.-G. Rhee, T. B. Renegar, The International Journal of Advanced Manufacturing Technology . 2007,第1a2期

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4. Noncontacting Surface Roughness Measurement using the Optical Stylus Method [C] . euspen European society for precision engineering and nanotechnology International Conference, european society for precision engineering and nanotechnology . 2001

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6. In vitro evaluation of modified surface microhardness measurement focus variation 3D microscopy and contact stylus profilometry to assess enamel surface loss after erosive–abrasive challenges [O] . Milán Gyurkovics, Tommy Baumann, Thiago Saads Carvalho, -1

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7. The geometrical interaction of the stylus and the measured surface in 3D roughness measurements [O] . Dowidar Helmy A M 2003

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8. Evaluation,Revision and Application of the NBS Stylus/Computer System for Surface Roughness Measurement:Minicomputer Software. [R] . teague, e. clayton 1976

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Noncontacting Surface Roughness Measurement using the Optical Stylus Method

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