Accurate optical surface profilometer based on Mirau-type interferometric microscope

机译：基于Mirau型干涉显微镜的精密光学表面轮廓仪

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Optical surface profilometer based on Mirau-type interferometric microscope, whose interference fringe spacing is directly and absolutely calibrated, has been designed and constructed. The standard deviation of the fringe spacing determination is about 0.2%. Just after the determination of the fringe spacing, the 3D surface profile of a sample can be measured using the phase-shifting technique. Repeatability of surface profile measurements is below sub-nanometer. Four kinds of standard samples with different step heights (certified values; 19.2, 45.9, 91.1 and 173.9nm) are measured by our instrument and the effectiveness of our method to determine the fringe spacing is confirmed.

机译：设计并构建了基于Mirau型干涉镜的光学表面轮廓仪，其干涉条纹间距得到了直接且绝对的校准。条纹间距确定的标准偏差约为0.2％。在确定条纹间距之后，可以使用相移技术测量样品的3D表面轮廓。表面轮廓测量的可重复性低于亚纳米。用我们的仪器测量了四种具有不同台阶高度（标准值； 19.2、45.9、91.1和173.9nm）的标准样品，并证实了我们确定条纹间距的方法的有效性。

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《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.462-465|共4页
会议地点 Turin(IT)
作者
Takuma Doi; Tomizo Kurosawa;
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作者单位

National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan;

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原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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Accurate optical surface profilometer based on Mirau-type interferometric microscope

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