Calibration standard for in-situ-determination of AFM tip-shapes

机译：原位测定AFM尖端形状的校准标准

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More and more AFM and AFM-profiler will be used to qualify micro- and nanostructures. For a correct characterization and evaluation of the measured structural details in the nanoscale range the knowledge of the current shape of the AFM-tip is needed. Additionally, often the interaction between the AFM-tip and the sample leads to a change of the tip shape. Our concept for the determination of the tip-shape is based on the measurement of a well-known sharp-edged silicon structure. Each such calibration sample also contains a selected structure serving as a calibrated width-standard. Consequently, the shape of AFM tips can be determined with an accuracy of 10 nm.

机译：越来越多的AFM和AFM轮廓仪将用于鉴定微结构和纳米结构。为了正确表征和评估纳米级范围内测量的结构细节，需要了解AFM尖端的当前形状。另外，AFM吸头与样品之间的相互作用通常会导致吸头形状发生变化。我们确定尖端形状的概念是基于对众所周知的锐边硅结构的测量。每个这样的校准样品还包含用作校准的宽度标准的选定结构。因此，可以以10 nm的精度确定AFM尖端的形状。

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来源
《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.530-533|共4页
会议地点 Turin(IT)
作者
U. Huebner; W. Morgenroth; S. Bornmann; H.G. Meyer; Th. Sulzbach; B. Brendel; W. Mirande;
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作者单位

Institute for Physical High Technology Jena, Germany;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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Calibration standard for in-situ-determination of AFM tip-shapes

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