Measuring Micrometer Steps With Nanometer Resolution

机译：以纳米分辨率测量千分尺

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Measurements of step heights in the micrometer range offers the possibility for comparing solid measures of nearly equal length. Using a laser interferometer it is possible to achieve a nanometer resolution. This was demonstrated by comparing gauge blocks with lengths of 1.01 mm to 1.1 mm, mounted on a base plate. The use of a scanning diode laser interferometer allows surface measurements within a range of 100 μm height difference with a lateral resolution of 5 μm. This set-up can also be used for surface profilometry.

机译：在微米范围内的台阶高度的测量提供了比较几乎相等长度的实心测量的可能性。使用激光干涉仪可以实现纳米分辨率。通过比较安装在基板上的长度为1.01毫米至1.1毫米的量块来证明这一点。扫描二极管激光干涉仪的使用允许在高度差为100μm且横向分辨率为5μm的范围内进行表面测量。此设置也可以用于表面轮廓测量。

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《2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy》|2001年|p.226-229|共4页
会议地点 Turin(IT)
作者
K. Meiners-Hagen; M. Wolf; A. Abou-Zeid;
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作者单位

Physikalisch-Technische Bundesanstalt, Braunschweig, Germany;

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原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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Measuring Micrometer Steps With Nanometer Resolution

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