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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Nanopositioning and Measuring Machine
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Nanopositioning and Measuring Machine

机译：纳米定位测量机

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摘要

A new nanopositioning and measuring machine designed for ultraprecision applications in a range of 25 mm x 25 mm x 5 mm with a resolution of 1.2 nm is described. With regard to its measuring range, accuracy and resolution this machine closes a gap in coordinate measuring techniques. The high accuracy is obtained by a zero Abbe offset arrangement with three plane mirror miniature interferometers, a surface-sensing probe and two angular sensors. The three linear stages are driven by voice coil actuators. An adaptive error compensation in the full range of motion was achieved by close-loop operation with five degrees of freedom. This new generation of multi-axis nanopositioning and measuring machines can be applied for the ultraprecision measurement of small pieces and microstructures, as well as in a variety of precision positioning techniques.
机译：描述了一种专为超精密应用而设计的新型纳米定位和测量机，其分辨率为25 mm x 25 mm x 5 mm，分辨率为1.2 nm。关于其测量范围，精度和分辨率，该机器填补了坐标测量技术的空白。通过具有三个平面镜微型干涉仪，一个表面感应探头和两个角度传感器的零阿贝偏移量设置，可以获得高精度。这三个线性级由音圈致动器驱动。通过具有五个自由度的闭环操作，可以在整个运动范围内实现自适应误差补偿。新一代的多轴纳米定位和测量机可用于小块和微结构的超精密测量，以及各种精密定位技术。

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