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首页> 外文会议>2nd International EUSPEN Conference on Precision Engineering Nanotechnology Vol.1, May 27th-31st, 2001, Turin, Italy >Manufacturing of Rainbow Actuators for Displacement Applications
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Manufacturing of Rainbow Actuators for Displacement Applications

机译：用于位移应用的彩虹执行器的制造

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摘要

A recent development in manufacturing of pre-stressed piezoelectric benders has increased actuating displacements up to millimeter scale still maintaining the moderate load capability. Thus RAINBOW (Reduced And INternally Biased Oxide Wafer) actuators as monolith structures can be easily realised in variety kind of applications like in fine-/micromechanics, telecommunication, noise cancelling, instrumentation, medical instruments, fluidistics and optics. Manufacturing of RAINBOW actuators has been carried out using a high temperature reducing treatment of ceramic PZT discs. Reduction process produces metal layer on the bottom of the disc, which causes internal stress that bends disc during cooling. Effect of the produced pre-stress can be observed as bending motion of the actuator that increases displacements, but decreases loading capability to moderate level. Processing of RAINBOWs and effect of different temperature and time in reduction treatment has been studied for PZT 5A, PZT 5H, PZT 5J and PZT 5R material types. A displacement and load characteristic of the produced actuators has been investigated.
机译：预应力压电弯管机制造领域的最新发展将致动位移提高到了毫米级，仍保持了中等负荷能力。因此，作为整体结构的RAINBOW（减薄的和内部偏置的氧化硅晶圆）执行器可以在各种应用中轻松实现，例如在精细/微机械，电信，噪声消除，仪器仪表，医疗仪器，流体力学和光学器件中。 RAINBOW执行器的制造是通过对陶瓷PZT圆盘进行高温还原处理来进行的。还原过程会在光盘的底部产生金属层，这会导致内部应力，从而在冷却期间使光盘弯曲。可以观察到产生的预应力的影响，即执行器的弯曲运动会增加位移，但将负载能力降低到中等水平。对于PZT 5A，PZT 5H，PZT 5J和PZT 5R材料类型，研究了彩虹的加工以及不同温度和时间对还原处理的影响。已经研究了所生产的致动器的位移和负载特性。

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