A metrological Atomic Force Microscope (MAFM) has been constructed which uses interferometry to generate image scales with direct traceability to the national standard of length. Three interferometers monitor the relative displacements of the AFM tip and sample in the x, y and z directions. Data from the interferometers is used directly to construct 3D images of sample surfaces. Traceable measurement of step height and pitch standards can be derived from the image data. This paper describes the MAFM and the major contributions to its measurement uncertainties.
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