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Nulltest for aspherical microlenses using Moire deflectometry

机译:使用莫尔偏转测量法对非球面微透镜进行Nulltest

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摘要

Cylindrical microlenses are used for the collimation of the fast axis of high power diode lasers. In order to assess the quality and control the manufacturing process the three dimensional shape of the microlenses has to be tested with high accuracy. In this paper a measuring system for testing aspherical, cylindrical microlenses will be presented that performs a nulltest using a Moire deflectometer to detect the aberrations of the test specimen from the ideal form. Compared to interferometrical measuring techniques Moire deflectometry is more robust and less sensitive to vibrations.
机译:圆柱微透镜用于准直大功率二极管激光器的快轴。为了评估质量并控制制造过程,必须高精度地测试微透镜的三维形状。在本文中,将介绍一种用于测试非球面圆柱微透镜的测量系统,该系统将使用莫尔偏转仪执行零测试,以检测理想形式的试样的像差。与干涉测量技术相比,莫尔偏转测量技术更坚固,对振动的敏感性更低。

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