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首页> 外文会议>The 2nd International Symposium on Functional Materials >Hydrogen-free Carbon Films by Unbalanced Magnetron Sputtering for Infrared Anti-reflection Coatings
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Hydrogen-free Carbon Films by Unbalanced Magnetron Sputtering for Infrared Anti-reflection Coatings

机译：非平衡磁控溅射无氢碳膜的红外增透膜

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摘要

The hydrogen-free diamond-like carbon (DLC) films are potential materials to be used as infrared anti-reflection protective coatings if their optical absorption can be reduced to get relatively thick films needed. In this study, hydrogen-free DLC films were deposited in an unbalanced magnetron sputtering (UBMS) system. The results of film thickness uniformity showed that this system is capable of depositing uniform films larger than 150 mm in diameter. The infrared transmission spectra of DLC films indicating that transparent films were obtained in the infrared region for the single side DLC coated on the silicon and germanium substrates, and about 68.83% and 63.05% transmittance were achieved respectively at the wave number of 2983/cm, close to theoretical value for non-absorption carbon material. No obvious absorption peaks were found between 5000 and 800 /cm. These excellent characteristics show that the hydrogen-free DLC films prepared in the UBMS system were suitable for infrared transmission enhancement applications.
机译：如果可以降低其光吸收以获得所需的较厚膜，则无氢类金刚石碳（DLC）膜是用作红外减反射保护膜的潜在材料。在这项研究中，无氢DLC膜沉积在不平衡磁控溅射（UBMS）系统中。膜厚均匀性的结果表明，该系统能够沉积直径大于150毫米的均匀膜。 DLC膜的红外透射光谱表明，在硅和锗基板上涂覆的单面DLC在红外区域获得了透明膜，并且在2983 / cm的波数下分别获得了约68.83％和63.05％的透射率，接近于非吸收性碳材料的理论值。在5000至800 / cm之间没有发现明显的吸收峰。这些优异的特性表明，在UBMS系统中制备的无氢DLC膜适用于红外透射增强应用。

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