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首页> 外文期刊>Diamond and Related Materials >Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings
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Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings

机译：非平衡磁控溅射制备的大面积均匀无氢类金刚石碳膜，用于红外减反射膜

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摘要

The hydrogen-free diamond-like carbon (DLC) films are potential materials to be used as infrared anti-reflection protective coatings if their optical absorption can be reduced to get relatively thick films needed. In this study, hydrogen-free DLC films were deposited by the physical vapor deposition (PVD) method in an unbalanced magnetron sputtering (UBMS) system with a rectangle graphite target of 440 X 80 mm in the argon atmosphere. The UBMS system was described in detail and the magnetron field distribution of the target was denoted in this work. The film thickness uniformity was investigated and the results showed that this system is capable of depositing uniform films larger than 150 mm in diameter. The infrared transmission spectra of DLC films were analyzed by a FT1R spectrometer, the results indicating that transparent films were obtained in the infrared region for the single side DLC coated on the silicon and germanium substrates, and about 68.83 percent and 63.05 percent transmittance were achieved respectively at the wave number of 2983 /cm, close to theoretical value for non-absorption carbon material. No obvious absorption peaks were found between 5000 and 800 /cm. The refractive index and extinction coefficient of the DLC films deposited under optimized conditions were about 2.08 and 0.067 respectively at the wavelength of 1600 nm. These important optical characteristics showed that the hydrogen-free DLC films prepared in the UBMS system were suitable for infrared transmission enhancement applications.
机译：如果可以减少其光吸收以获得所需的较厚膜，则无氢类金刚石碳（DLC）膜是用作红外减反射保护膜的潜在材料。在这项研究中，无氢DLC膜是通过物理气相沉积（PVD）方法在不平衡磁控溅射（UBMS）系统中沉积的，其中氩气中的矩形石墨靶为440 X 80 mm。详细介绍了UBMS系统，并在这项工作中指出了目标的磁控场分布。研究了膜厚均匀性，结果表明该系统能够沉积直径大于150毫米的均匀膜。用FT1R光谱仪分析了DLC薄膜的红外透射光谱，结果表明，在硅和锗衬底上单面DLC的红外区域获得了透明薄膜，透射率分别约为68.83％和63.05％。在波数为2983 / cm时，接近于非吸收性碳材料的理论值。在5000至800 / cm之间没有发现明显的吸收峰。在最佳条件下沉积的DLC膜在1600 nm波长下的折射率和消光系数分别约为2.08和0.067。这些重要的光学特性表明，在UBMS系统中制备的无氢DLC膜适用于红外透射增强应用。

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