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Interaction of Hg Vapour with Thin Films of Gold

机译:汞蒸气与金薄膜的相互作用

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摘要

The sensors of mercury vapour based on thin Au film resistors were investigated. The films of Au deposited on Si and sapphire substrates were exposed to Hg vapour at room temperature, changing the Hg concentration and the exposure time. The interaction of Hg with Au film was studied by using X-ray photoelectron spectroscopy (XPS), secondary ion mass spectroscopy (SIMS) and secondary electron microscopy (SEM). The initial formation of the thin surface sublayer of amalgam and the subsequent disruption of Au film at longer exposures are discussed on the basis of experimental data obtained.
机译:研究了基于薄膜金电阻的汞蒸气传感器。在室温下,将沉积在Si和蓝宝石衬底上的Au膜暴露于Hg蒸气,从而改变Hg浓度和暴露时间。利用X射线光电子能谱(XPS),二次离子质谱(SIMS)和二次电子显微镜(SEM)研究了汞与金膜的相互作用。基于获得的实验数据,讨论了汞齐薄表面亚层的最初形成以及随后在较长时间曝光下金膜的破坏。

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