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首页> 外文会议>The 41st IEEE International Conference on Plasma Science, and the 20th International Conference on High-Power Particle Beams >Influence of the excitation frequency increase on a fluid model of the capacitively coupled argon plasma
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Influence of the excitation frequency increase on a fluid model of the capacitively coupled argon plasma

机译：激发频率增加对电容耦合氩等离子体流体模型的影响

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In this work a simulation procedure for a plasma fluid model at very high excitation frequencies (VHF) is presented. The modeling of gas discharges based on the fluid model requires the input of collision cross-sections and electron energy distribution function (EEDF) which is obtained by solving the Boltzmann equations (BE). In this case the general discharge conditions must be known. For the higher excitation frequencies above 100 MHz the complex input parameter set for a BE solver is hard to obtain. Thus, a method of optimization of the modeling parameters for VHF range has been developed and is introduced in this work. Using a 1D plasma model for a capacitively coupled plasma reactor (CCP) the influence of the excitation frequency on the simulation procedure is presented. The results of performed calculations show the dependence of the EEDF and the computed transport properties like electron mobility, electron diffusivity, electron energy mobility, and electron energy diffusivity on the plasma excitation frequency.
机译：在这项工作中，提出了在非常高的激发频率（VHF）下对等离子体流体模型进行仿真的程序。基于流体模型对气体放电进行建模需要输入碰撞截面和通过求解玻尔兹曼方程（BE）获得的电子能量分布函数（EEDF）。在这种情况下，必须知道一般的放电条件。对于高于100 MHz的较高激励频率，很难获得为BE求解器设置的复杂输入参数。因此，已经开发了一种针对VHF范围的建模参数优化方法，并将其引入到这项工作中。将一维等离子体模型用于电容耦合等离子体反应器（CCP），介绍了激励频率对仿真程序的影响。计算结果表明，EEDF和计算出的传输特性（如电子迁移率，电子扩散率，电子能量迁移率和电子能量扩散率）与等离子体激发频率有关。

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