CAPACITIVELY AND INDUCTIVELY COUPLED PLASMAS FOR MEMS APPLICATIONS

机译：MEMS应用中的电容性和电感性耦合等离子体

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We consider the development of capacitively and inductively coupled microplasma reactors for detection, control and chemical transformation in microelectromechanical (mems) applications. Current progress in fabrication techniques, including hot embossing, soft and laser lithography is reviewed. Numerical simulations of the interaction of electromagnetic fields with plasma flows in which the plasma flow is at right angles with the electric and magnetic field are analyzed. Two cases in which the electromagnetic fields induce lorentz forces* that control the flow are presented. In the first case, the lorentz forces act along the flow direction and produce and increase in the axial pressure that accelerates the flow (micropump configuration). In the second case, the lorentz forces act against the flow by causing a drop in the axial pressure that slows down the flow (microbrake configuration).

机译：我们考虑开发电容和电感耦合的微等离子体反应器，以用于微机电（mems）应用中的检测，控制和化学转化。综述了包括热压花，软和激光光刻在内的制造技术的最新进展。分析了电磁场与等离子体流相互作用的数值模拟，其中等离子体流与电场和磁场成直角。给出了两种情况，其中电磁场会产生控制流量的洛伦兹力*。在第一种情况下，洛伦兹力沿流动方向作用，并产生并增加轴向压力，从而加速流动（微型泵配置）。在第二种情况下，洛伦兹力通过引起轴向压力下降来减慢流动速度（微刹车配置），从而降低了流动速度。

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来源
《7th Biennial Conference on Engineering Systems Design and Analysis 2004(ESDA 2004) vol.3: Design Engineering; Maintenance Engineering; Manufacturing Engineering; ...》|2004年|P.545-551|共7页
会议地点 Manchester(GB)
作者
JAIME H. LOZANO-PARADA; WILLIAM B.J. ZIMMERMAN;
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作者单位

DEPARTMENT OF CHEMICAL AND PROCESS ENGINEERING, THE UNIVERSITY OF SHEFFIELD, MAPPIN STREET, S1 3JD, SHEFFIELD, UK;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械设计、计算与制图;
关键词
microplasma; MHD; ICP; CCP;

机译：微浆; MHD; ICP; CCP;

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5. Comparing the roles of inductive and capacitive coupling in a planar inductively coupled plasma through both theory and experiment. [D] . Watanabe, Masahiro. 2001

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CAPACITIVELY AND INDUCTIVELY COUPLED PLASMAS FOR MEMS APPLICATIONS

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