• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>8th International conference on commercialization of micro and nano systems (COMS 2003) >DESIGNING MANUFACTURABLE MEMS-THE CONVERGENCE OF DESIGN AND MANUFACTURING
【24h】

DESIGNING MANUFACTURABLE MEMS-THE CONVERGENCE OF DESIGN AND MANUFACTURING

机译：设计可制造的MEMS-设计与制造的融合

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The development of a robust MEMS Design for Manufacturing (DFM) strategy is enabled by three capabilities that allow concurrent engineering of MEMS devices: 1) software capable of incorporating materials and process specific variables and statistical data into the design and simulation stream 2) test structures that exercise functionality sufficient to measure MEMS device characteristics and 3) processes proven for various common classes of MEMS devices, which can be used to fabricate test structures and provide measured data to support manufacturing analysis and yield improvement. A methodology for MEMS DFM is presented that focuses on rapid process and design qualification through systematic parametric modeling and testing, from initial development of specifications to volume manufacturing. The result is highly qualified designs with accurately predicted behavior for scalable, repeatable, cost-effective volume production.
机译：鲁棒的MEMS制造设计（DFM）策略的开发是通过允许对MEMS设备进行并行工程设计的三种功能实现的：1）能够将材料和处理特定变量以及统计数据纳入设计和仿真流的软件2）测试结构具有足以测量MEMS器件特性的功能，以及3）已针对各种常见的MEMS器件类别证明的工艺，这些工艺可用于制造测试结构并提供测量数据以支持制造分析和提高产量。提出了MEMS DFM的方法论，该方法论着重于通过系统的参数化建模和测试来进行快速的过程和设计鉴定，从规范的最初制定到批量生产。结果是具有可精确预测行为的高品质设计，可扩展，可重复，具有成本效益的批量生产。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号