Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon

机译：等离子体加氢硅中的界面氧热供体形成

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The formation of thermal donors generated in Cz-Si under heat treatment at 450℃ has been investigated. The acceleration of growth rate for thermal donors was observed in near surface region of boron doped silicon with use of preliminary hydrogenation. It has been shown that namely atomic state of hydrogen is responsible for rapid formation of thermodonors due to its interaction with diluted oxygen.

机译：研究了在450℃热处理下Cz-Si中生成的热供体的形成。通过初步氢化，在硼掺杂的硅的近表面区域中观察到了供热体生长速率的加速。已经显示出氢的原子态由于其与稀氧的相互作用而负责快速形成热供体。

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《9th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST 2001), Sep 30-Oct 3, 2001, S. Tecla, Italy》|2001年|p.99-104|共6页
会议地点 S. Tecla(IT);S. Tecla(IT)
作者
G.N. Kamaev; V.V. Bolotov; S.A. Chernaev; M.D. Efremov;
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作者单位

Institute of Semiconductor Physics SB, Russian Academy of Sciences, pr. Lavrentieva 13, RU-630090 Novosibirsk, Russia;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
hydrogen in silicon; hydrogen plasma; oxygen in silicon; oxygen-related thermal donors; silicon;

机译：硅中的氢氢等离子体硅中的氧与氧气有关的热供体；硅;

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1. Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon [J] . G. N. Kamaev, V. V. Bolotov, S. A. Chernaev, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2002,第0期

机译：等离子体加氢硅中的界面氧热供体形成
2. Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon [J] . G. N. Kamaev, V. V. Bolotov, S. A. Chernaev, Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2002,第0期

机译：等离子体加氢硅中的界面氧热供体形成
3. Hydride formation on the platelet inner surface of plasma-hydrogenated crystalline silicon investigated with Raman spectroscopy [J] . Y. Ma, Y. L. Huang, W. Diingen, Physical review. B, Condensed Matter And Materials Physics . 2005,第8期

机译：用拉曼光谱研究等离子体氢化晶体硅片内表面上的氢化物形成
4. Fe Ions Diffusion and Oxygen Complexes Evolution during Thermodonors Annealing in B-Doped Czochralsky Silicon Crystal [C] . Vladimir Skidanov International Conference on Diffusion in Solids and Liquids, Mass Transfer - Heat Transfer - Microstructure Properties - Nanodiffusion and Nanostructured Materials . 2010

机译：FE离子扩散和氧气复合物在B掺杂Czochralsky硅晶体中的热电池退火期间的进化
5. Study of silver deposition on silicon (100) by IR spectroscopy and patina formation study of oxygen reduction reaction on ruthenium or platinum. [D] . Yang, Fan. 2009

机译：红外光谱研究银在硅（100）上的沉积以及铜或钌或铂上的氧还原反应的铜绿形成研究。
6. Electric-field-assisted formation of an interfacial double-donor molecule in silicon nano-transistors [O] . Arup Samanta, Daniel Moraru, Takeshi Mizuno, -1

机译：电场辅助在硅纳米晶体管中形成界面双供体分子
7. Photocatalysis: Light‐Induced Activation of Adaptive Junction for Efficient Solar‐Driven Oxygen Evolution: In Situ Unraveling the Interfacial Metal–Silicon Junction (Adv. Energy Mater. 31/2019) [O] . Ching‐Wei Tung, Tsung‐Rong Kuo, Chia‐Shuo Hsu, 2019

机译：光催化：光诱导的高效太阳能驱动氧气进化激活的自适应交界处：原位揭示界面金属 - 硅结（ADV。能源母体。31/2019）

Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon

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