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首页> 外文会议>Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III; Proceedings of SPIE-The International Society for Optical Engineering; vol.6672 >Use of light-emitting diode (LED) in interference microscopy
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Use of light-emitting diode (LED) in interference microscopy

机译：发光二极管（LED）在干涉显微镜中的使用

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摘要

We present a systematic investigation of the use of LED as light sources for interference microscopy, in comparison with more standard halogen illumination. For translation height mode (also known as vertical scanning or low coherence microscopy), five white LED-based illuminations setup have been tested, including the use of filters to remove the shoulder in the blue region often encountered in such LED. For the six white light illuminations (five LED plus halogen), we have measured the irradiance spectra and calculated and measured the corresponding correlograms. The influence of the combined effect of the illumination spectra and a dispersive phase shift on the calculated height reconstruction is shown for a center-of-mass algorithm. In phase shift mode, both monochromatic LED and white LED with inteference filters have been used. Blue LED illumination improves the lateral resolution compared to red illumination, a task which can be done with halogen lamp only with very reflecting sample due to its low power in the blue wavelengths. All measurements have been performed with our home-made interference microscope, which is described in Proc. SPIE 6188,61880T(2006).
机译：与更标准的卤素照明相比，我们对使用LED作为干涉显微镜的光源进行了系统的研究。对于平移高度模式（也称为垂直扫描或低相干显微镜），已经测试了五种基于白光LED的照明设置，包括使用滤光镜去除此类LED经常遇到的蓝色区域中的肩部。对于六种白光照明（五个LED加卤素灯），我们测量了辐照度光谱，并计算并测量了相应的相关图。对于质心算法，显示了照明光谱和色散相移的组合效应对计算出的高度重建的影响。在相移模式下，单色LED和带干扰滤波器的白光LED均已使用。与红色照明相比，蓝色LED照明提高了横向分辨率，而卤素灯只能在反射性很强的样品下完成此任务，这是因为其在蓝色波长下的功率很低。所有测量均使用我们的自制干涉显微镜进行，该过程在Proc。 SPIE 6188,61880T（2006）。

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