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首页> 外文会议>Advanced Photon Counting Techniques XI >Room Temperature 1040fps, 1 Megapixel Photon-Counting Image Sensor with 1.1um Pixel Pitch
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Room Temperature 1040fps, 1 Megapixel Photon-Counting Image Sensor with 1.1um Pixel Pitch

机译：室温1040fps，1兆像素光子计数图像传感器，像素间距为1.1um

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摘要

A 1Mjot single-bit quanta image sensor (QIS) implemented in a stacked backside-illuminated (BSI) process is presented. This is the first work to report a megapixel photon-counting CMOS-type image sensor to the best of our knowledge. A QIS with 1.1μm pitch tapered-pump-gate jots is implemented with cluster-parallel readout, where each cluster of jots is associated with its own dedicated readout electronics stacked under the cluster. Power dissipation is reduced with this cluster readout because of the reduced column bus parasitic capacitance, which is important for the development of 1Gjot arrays. The QIS functions at 1040fps with binary readout and dissipates only 17.6mW, including I/O pads. The readout signal chain uses a fully differential charge-transfer amplifier (CTA) gain stage before a 1b-ADC to achieve an energy/bit FOM of 16.1pJ/b and 6.9pJ/b for the whole sensor and gain stage+ADC, respectively. Analog outputs with on-chip gain are implemented for pixel characterization purposes.
机译：提出了一种在堆叠式背照式（BSI）工艺中实现的1Mjot单位量子图像传感器（QIS）。据我们所知，这是首次报告百万像素光子计数CMOS型图像传感器的工作。 QIS具有1.1μm间距的锥形泵栅点焊，可通过簇并行读出来实现，其中每个点簇都与堆叠在簇下面的专用读出电子设备相关联。由于减少了列总线的寄生电容，因此通过集群读取可以降低功耗，这对于1Gjot阵列的开发很重要。 QIS的工作速度为1040fps，具有二进制读出功能，包括I / O焊盘在内的功耗仅为17.6mW。读出信号链在1b-ADC之前使用全差分电荷转移放大器（CTA）增益级，以使整个传感器和增益级+ ADC的能量/位FOM分别达到16.1pJ / b和6.9pJ / b 。具有片上增益的模拟输出用于像素表征。

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  • 来源
    《Advanced Photon Counting Techniques XI》|2017年|102120H.1-102120H.8|共8页
  • 会议地点 Anaheim(US)
  • 作者

    S. Masoodian; J. Ma; D. Starkey; T.J. Wang; Y. Yamashita; E.R. Fossum;

  • 作者单位

    Thayer School of Engineering, Dartmouth College, 14 Engineering Dr., Hanover, NH USA 03755,Gigajot Technology LLC, Lebanon, NH USA 03766;

    Thayer School of Engineering, Dartmouth College, 14 Engineering Dr., Hanover, NH USA 03755;

    Thayer School of Engineering, Dartmouth College, 14 Engineering Dr., Hanover, NH USA 03755;

    Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan;

    Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan;

    Thayer School of Engineering, Dartmouth College, 14 Engineering Dr., Hanover, NH USA 03755;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Photon counting detector; quanta image sensor; QIS; CMOS image sensor; CIS; charge-transfer amplifier;

    机译：光子计数检测器；量子图像传感器QIS； CMOS图像传感器独联体;电荷转移放大器;

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