• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Advances in Electronic Packaging 2005 pt.A >DEFORMATION ANALYSIS OF CENTER-ANCHORED SQUARE PLATE INDUCED BY RESIDUAL GRADIENT STRESS
【24h】

DEFORMATION ANALYSIS OF CENTER-ANCHORED SQUARE PLATE INDUCED BY RESIDUAL GRADIENT STRESS

机译：残余梯度应力引起的中心锚固矩形板的变形分析

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

For optical MEMS or Micro-Electro-Mechanical-Optical System (MEMOS) devices, as depositing metal on the structure plate, the mismatch of thermal expansion coefficients between the metal layer and structure layer will induce residual gradient stress after release. Therefore, the residual gradient stress will deform the structure layer. The deformation could be used as profile of micro focusing mirror due to its parabolic-like shape. In this work, the effect of structure sizes and material properties on residual stress for center-anchored square plate focusing mirror is investigated. The center-anchored circular plate focusing mirror is designed and analyzed. In numerical analysis using finite element method, it is found that the deformation is circular shape in axial direction and parabolic-like profile in the radial direction, even the mirror being square shape. And the radial shape determines the focal length. In general, the thinner plate and the thicker metal layer will cause larger deformation. The larger square sizes will cause larger deformation. However, it is found that the effect of anchor sizes on deformation could be neglected. Only in the anchor near region, the deformation would be affected. And the depositing temperature will have obvious effect on deformation. It is also found in literature review, the deformation would be unsymmetrical and called warpage. Warpage is a serious problem to destroy the devices. Therefore, the warpage is also discussed. The thicker structure layer and thinner metal layer need higher temperature to cause warpage phenomena. The warpage temperature increases nonlinearly as the structure layer increasing. However, in thinner structure layer condition, the warpage temperature decreases first and increases following. In general, from the results it could be considered that as the ratio of structure and depositing metal layer thickness increasing, the deformation will reach to a limit value due to the saturation of stress gradient.
机译：对于光学MEMS或微电子机械光学系统（MEMOS）器件，由于在结构板上沉积金属，金属层和结构层之间的热膨胀系数不匹配将在释放后引起残余梯度应力。因此，残余梯度应力将使结构层变形。该变形由于其抛物线状的形状可以用作微聚焦镜的轮廓。在这项工作中，研究了结构尺寸和材料特性对中心锚定方形板聚焦镜残余应力的影响。设计并分析了中心锚定圆板聚焦镜。在使用有限元方法进行的数值分析中，发现变形是轴向的圆形和径向的抛物线形轮廓，甚至镜面是正方形。径向形状决定了焦距。通常，较薄的板和较厚的金属层将引起较大的变形。较大的正方形将导致较大的变形。但是，发现可以忽略锚尺寸对变形的影响。仅在锚附近区域，变形会受到影响。而且沉积温度对变形有明显的影响。在文献综述中也发现，变形将是不对称的，称为翘曲。翘曲是破坏设备的严重问题。因此，也讨论了翘曲。较厚的结构层和较薄的金属层需要较高的温度才能引起翘曲现象。翘曲温度随着结构层的增加而非线性地增加。然而，在较薄的结构层条件下，翘曲温度首先降低，然后升高。通常，从结果可以认为，随着结构与沉积金属层厚度之比的增加，由于应力梯度的饱和，变形将达到极限值。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号