Large-field high-energy KB microscope with aperiodic multilayer

著录项

• 来源
  《Advances in metrology for x-ray and EUV optics III》|2010年|p.78010C.1-78010C.6|共6页
• 会议地点 San Diego CA(US)
• 作者

  Shengzhen Yi; Baozhong Mu; Zhanshan Wang; Xin Wang; Li Jiang; et al;

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• 作者单位

  Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai,200092;

  Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai,200092;

  Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai,200092;

  Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai,200092;

  Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai,200092;

  et al;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学计量仪器;
• 关键词

  Kirkpatrick-Baez microscope; large field; aperiodic multilayer; ICF;

  机译：Kirkpatrick-Baez显微镜；大领域非周期性多层ICF;