Surface profile measurement of KB mirrors using Fizeau laser interferometer

机译：使用Fizeau激光干涉仪测量KB反射镜的表面轮廓

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Fizeau interferometer is the most commonly used interferometer for testing optical components. The aim of this work is to apply this technique to the measurement of elliptical Kirkpatrick-Baez (KB) mirrors during their fabrication process. KB mirrors are widely used at synchrotron radiation facilities around the world for x-ray focusing. Fizeau interferometer can provide accurate measurements for KB mirrors. Recently a KB mirror that can focus X-ray down to 150 nm has been fabricated in the Argonne National Laboratory.

机译：Fizeau干涉仪是用于测试光学组件的最常用干涉仪。这项工作的目的是将该技术应用于椭圆形Kirkpatrick-Baez（KB）反射镜在其制造过程中的测量。 KB反射镜在全球同步辐射设备中广泛用于X射线聚焦。 Fizeau干涉仪可以为KB反射镜提供准确的测量。最近，在阿贡国家实验室制造了可将X射线聚焦至150 nm的KB反射镜。

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来源
《Advances in metrology for x-ray and EUV optics III》|2010年|p.78010K.1-78010K.6|共6页
会议地点 San Diego CA(US)
作者
J. Qian; L. Assoufid; C. Liu; B. Shi; W. Liu;
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作者单位

Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue Argonne, Illinois 60439, USA;

Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue Argonne, Illinois 60439, USA;

Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue Argonne, Illinois 60439, USA;

Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue Argonne, Illinois 60439, USA;

Advanced Photon Source, Argonne National Laboratory, 9700 South Cass Avenue Argonne, Illinois 60439, USA;

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原文格式 PDF
正文语种 eng
中图分类光学计量仪器;
关键词
Fizeau interferometer; stitching interferometer; KB mirror; profile coating;

机译：菲索干涉仪；拼接干涉仪KB镜像；异型涂料;

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专利

1. Measurement of profiles along a circle on two flat surfaces by use of a Fizeau interferometer with no standard [J] . Shohachi Sonozaki, Koichi Iwata, Yoshihisa Iwahashi Applied optics . 2003,第34期

机译：使用不带标准件的Fizeau干涉仪在两个平面上沿圆周测量轮廓
2. Measurement of the surface form error of large aperture plane optical surfaces with a polarization phase-shifting liquid reference reflection Fizeau interferometer [J] . Chatterjee Sanjib, Kumar Y. Pavan, Singh Rishipal, Applied optics . 2016,第2期

机译：偏振相移液体参考反射菲索干涉仪测量大孔径平面光学表面的表面形状误差
3. Measurement of surface figure of plane polarization phase-shifting Fizeau optical surfaces with interferometer [J] . Chatterjee S, Kumar YP, Bhaduri B Optics & Laser Technology . 2007,第2期

机译：用干涉仪测量平面偏振相移菲索光学表面的表面图形
4. Surface profile measurement of KB mirrors using Fizeaulaser interferometer [C] . J. Qian, L. Assoufid, C. Liu, SPIE on Advances in Metrology for X-ray and EUV Optics . 2010

机译：使用FizeAulaser干涉仪的KB镜子的表面轮廓测量
5. Measurement and analysis optimization of large aperture laser Fizeau interferometer. [D] . Novak, Erik Lowell. 1998

机译：大孔径激光菲索干涉仪的测量和分析优化。
6. A Dual-Polymer Fiber Fizeau Interferometer for Simultaneous Measurement of Relative Humidity and Temperature [O] . Chao-Tsung Ma, Yu-Wei Chang, Yuan-Jie Yang, 2017

机译：同时测量相对湿度和温度的双聚合物光纤菲索干涉仪
7. Large aperture Fizeau interferometer commissioning and preliminary measurements of a long x-ray mirror at European X-ray Free Electron Laser [O] . Vannoni, Maurizio, Freijo-Martin, Idoia 2017

机译：欧洲X射线自由电子激光大孔径Fizeau干涉仪的调试和长X射线镜的初步测量
8. In-Situ Measurements of Temperature Profiles and Plume Formation at the Surfaces of Samples Irradiated by a Picosecond Laser Pulse Train [R] . Grun, J. , Fischer, R. , Manka, C. K. , 2003

机译：皮秒激光脉冲序列辐照样品表面温度分布和羽流形成的原位测量

Surface profile measurement of KB mirrors using Fizeau laser interferometer

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