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首页> 外文会议>Advances in metrology for X-ray and EUV optics V >At-wavelength Metrology of X-ray Optics at Diamond Light Source
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At-wavelength Metrology of X-ray Optics at Diamond Light Source

机译：金刚石光源的X射线光学器件的波长计量

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摘要

Modern, third-generation synchrotron radiation sources provide coherent and extremely bright beams of X-ray radiation. The successful exploitation of such beams depends to a significant extent on imperfections and misalignment of the optics employed on the beamlines. This issue becomes even more critical with the increasing use of active optics, and the desire to achieve diffraction-limited and coherence-preserving X-ray beams. In recent years, significant progress has been made to improve optic testing and optimization techniques, especially those using X-rays for so-called at-wavelength metrology. These in-situ and at-wavelength metrology methods can be used not only to optimize the performance of X-ray optics, but also to correct and minimize the collective distortions of upstream beamline optics, including monochromators, and transmission windows. An overview of at-wavelength metrology techniques implemented at Diamond Light Source is presented, including grating interferometry and X-ray near-field speckle based techniques. Representative examples of the application of these techniques are also given, including in-situ and at-wavelength calibration and optimization of: active, piezo bimorph mirrors; Kirkpatrick-Baez (KB) mirrors; and refractive optics such as compound refractive lenses.
机译：现代的第三代同步加速器辐射源提供相干且非常明亮的X射线辐射束。这种光束的成功利用在很大程度上取决于光束线上采用的光学器件的缺陷和未对准。随着越来越多的有源光学器件的使用，以及对获得衍射限制和保持相干性的X射线束的渴望，这个问题变得更加关键。近年来，在改进光学测试和优化技术方面取得了重大进展，尤其是那些使用X射线进行所谓的波长计量的技术。这些原位和波长计量方法不仅可以用于优化X射线光学器件的性能，而且可以用于校正和最小化上游光束线光学器件（包括单色仪和透射窗）的总体畸变。介绍了在钻石光源处实现的波长计量技术的概述，包括基于光栅干涉法和基于X射线近场散斑的技术。还给出了这些技术应用的代表性示例，包括原位和波长校准以及以下方面的优化：有源压电双压电晶片镜； Kirkpatrick-Baez（KB）镜子；以及折射光学器件，例如复合折射透镜。

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