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Design, preparation and characterisation of high performance narrow band-pass filters for the infrared range

机译:红外范围内高性能窄带通滤波器的设计,制备和表征

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High performance narrow bandpass filters for the mid-infrared range of the spectrum have been designed, prepared and characterised. The filters must assure an optimal rejection with a mean transmission lower than 0.02%T and a maximum transmission lower than 0.1%T out of the pass band from 1 to 6 microns. The pass band must be centered in 4.52+-0.04 microns, have a full width at half maximum of 0.09+-0.01 microns and a maximum transmittance higher than 75% when measured at normal incidence. A 75-layer theoretical design meeting all the requirements is obtained by computer optimisation using experimental values for the optical constants of the layers; SiO and Ge are the low and high index materials respectively. A tolerance analysis of the design indicates that the rejection band performance is very stable, but the pass band is very sensitive to thickness deviations in a group of seven layers, defined as the critical part of the coating. The filters are prepared by evaporation in high vacuum; the deposition rate and final thickness of each layer are controlled by a quartz-crystal monitor. Filters with the required performance are obtained applying a method based on the previous deposition and optical characterisation of the critical part of the coating. Finally, the parameters of the transmittance measurements have been optimised to assure the necessary accuracy of the spectra, including the blocking of the pass band to reliably define the rejection parameters.
机译:已经设计,准备和表征了用于光谱中红外范围的高性能窄带通滤波器。滤波器必须确保在1至6微米的通带范围内具有平均透射率低于0.02%T且最大透射率低于0.1%T的最佳抑制性能。通带的中心必须在4.52 + -0.04微米的中心,半峰全宽为0.09 + -0.01微米,并且在法向入射时测得的最大透射率高于75%。通过使用各层光学常数的实验值的计算机优化,可以获得满足所有要求的75层理论设计; SiO和Ge分别是低折射率材料和高折射率材料。设计的公差分析表明,拒绝带性能非常稳定,但通带对七层(定义为涂层的关键部分)的厚度偏差非常敏感。过滤器是通过高真空蒸发制备的;每层的沉积速率和最终厚度由石英晶体监控器控制。使用基于先前沉积和涂层关键部分的光学特性的方法,可以获得具有所需性能的过滤器。最后,对透射率测量的参数进行了优化,以确保光谱的必要准确性,包括对通带的阻断,以可靠地定义抑制参数。

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